Multi-metal coordination polymers grown through hybrid molecular layer deposition.

Coordination polymers deposited by hybrid molecular layer deposition (MLD) techniques are of interest as highly conformal, functional materials. Incorporation of a second metal into these coordination polymers can result in additional functionality or fine tuning of the materials properties. Here, we investigate the deposition of multi-metal coordination polymers using hybrid MLD of Zn-Al and Zn-Hf with ethylene glycol as the organic linker. It is found that facile transmetalation occurs for the Zn-Al films, which results in Al-rich films, but does not take place for the Zn-Hf films. Additionally, the Zn-Hf films are found to be more resilient to ambient conditions than the pure Zn-based coordination polymer.