Wang Daodang, Yin Yamei, Dou Jinchao, Kong Ming, Xu Xinke, Lei Lihua, Liang Rongguang
Appl Opt. 2021 Mar 1;60(7):1973-1981. doi: 10.1364/AO.415715.
Deflectometry, with its noticeable advantages such as simple structure, large dynamic range, and high accuracy comparable to interferometry, has been one of the powerful metrological techniques for optical surfaces in recent years. In the "null" deflectometric transmitted wavefront testing of refractive optics, ray tracing of the test system model is required, in which both the miscalibration of system geometrical parameters and optical tolerances on tested optics could introduce significant geometrical aberrations in the testing results. In this paper, the geometrical aberration introduced by a system modeling error in the transmitted wavefront testing is discussed. Besides, a calibration method based on polynomial optimization of geometrical aberration is presented for the geometrical aberration calibration. Both simulation and experiment have been performed to validate the feasibility of the proposed calibration method. The proposed method can calibrate the optical tolerances on tested optics effectively, and it is feasible even with a large geometric error, providing a viable way to address the uncertainty in system modeling in transmitted wavefront testing of freeform refractive optics with large dynamic range.
近年来，偏折测量法凭借其结构简单、动态范围大以及精度高（可与干涉测量法相媲美）等显著优势，成为了用于光学表面的强大计量技术之一。在折射光学元件的“零位”偏折透射波前测试中，需要对测试系统模型进行光线追迹，其中系统几何参数的校准误差以及被测光学元件的光学公差都可能在测试结果中引入显著的几何像差。本文讨论了透射波前测试中系统建模误差所引入的几何像差。此外，还提出了一种基于几何像差多项式优化的校准方法来进行几何像差校准。通过仿真和实验验证了所提校准方法的可行性。该方法能够有效校准被测光学元件的光学公差，即使在存在较大几何误差的情况下也可行，为解决大动态范围自由形式折射光学元件透射波前测试中系统建模的不确定性提供了一种可行的方法。
