Hassan Mothana A, Al-Nedawe Basman M, Fakhri Makram A
Appl Opt. 2021 Mar 10;60(8):2339-2347. doi: 10.1364/AO.417370.
Free-space optical measurement systems can have a direct impact on evaluation systems operational in propagation paths. During propagation via optical fibers, light suffers scattering or interference, causing some output signal loss with an uncertainty outcome. Therefore, this study aims to explore the instant decisions related to the use of single- and multi-mode fiber optics and how they affect the gathering of data from high-speed optical measurement instrument links. The study also seeks to address a number of design methodology aspects and the empirical outcomes related to a surface topography measurement sensor based on fiber optics capable of surface roughness or step-height measurement. The study suggests that the Fourier transform profilometry method (FTP) can overcome the disadvantages of optical metrology sensors (e.g., bulkiness, challenging set-up, high costs, and low speed). However, despite eliminating vertical height problems, the Fourier transform profilometry (FTP) did have some shortcomings for every outcome related to core variables, including the dispersive optical fiber link sensor. The synthetic wavelength method enabled the dispersive optical fiber link sensor to calculate the vertical step height of the selected sample (1 µm). There was improved step-height repeatability, with satisfactory from 20 to 18 nm outcome improvement range. Additional investigations are necessary to establish the compatibility of single- or multi-mode optical fiber sensors with particular instruments, especially those currently preferred for embedded metrology applications.
自由空间光学测量系统会对在传播路径中运行的评估系统产生直接影响。在通过光纤传播期间，光会遭受散射或干涉，导致一些输出信号损失并产生不确定的结果。因此，本研究旨在探索与单模和多模光纤使用相关的即时决策，以及它们如何影响从高速光学测量仪器链路收集数据。该研究还试图解决一些设计方法方面的问题以及与基于光纤的表面形貌测量传感器相关的实证结果，该传感器能够进行表面粗糙度或台阶高度测量。研究表明，傅里叶变换轮廓术方法（FTP）可以克服光学计量传感器的缺点（例如，体积庞大、设置具有挑战性、成本高和速度慢）。然而，尽管消除了垂直高度问题，但傅里叶变换轮廓术（FTP）对于与核心变量相关的每个结果都存在一些缺点，包括色散光纤链路传感器。合成波长方法使色散光纤链路传感器能够计算所选样品（1微米）的垂直台阶高度。台阶高度重复性得到了改善，结果改善范围从20纳米到18纳米，令人满意。需要进行额外的研究来确定单模或多模光纤传感器与特定仪器的兼容性，特别是那些目前在嵌入式计量应用中首选的仪器。
