Tang Zifan, Dong Ming, He Xiaodong, Guan Weihua
Department of Electrical Engineering, Pennsylvania State University, University Park, Pennsylvania 16802, United States.
Department of Biomedical Engineering, Pennsylvania State University, University Park, Pennsylvania 16802, United States.
ACS Appl Mater Interfaces. 2021 Mar 24;13(11):13383-13391. doi: 10.1021/acsami.0c23106. Epub 2021 Mar 11.
The controlled dielectric breakdown emerged as a promising alternative toward accessible solid-state nanopore fabrication. Several prior studies have shown that laser-assisted dielectric breakdown could help control the nanopore position and reduce the possibility of forming multiple pores. Here, we developed a physical model to estimate the probability of forming a single nanopore under different combinations of the laser power and the electric field. This model relies on the material- and experiment-specific parameters: the Weibull statistical parameters and the laser-induced photothermal etching rate. Both the model and our experimental data suggest that a combination of a high laser power and a low electric field is statistically favorable for forming a single nanopore at a programmed location. While this model relies on experiment-specific parameters, we anticipate it could provide the experimental insights for nanopore fabrication by the laser-assisted dielectric breakdown method, enabling broader access to solid-state nanopores and their sensing applications.
可控介电击穿成为一种有望实现可及的固态纳米孔制造的替代方法。先前的多项研究表明，激光辅助介电击穿有助于控制纳米孔位置并降低形成多个孔的可能性。在此，我们开发了一个物理模型，以估计在激光功率和电场的不同组合下形成单个纳米孔的概率。该模型依赖于材料和实验特定参数：威布尔统计参数和激光诱导的光热蚀刻速率。模型和我们的实验数据均表明，高激光功率和低电场的组合在统计上有利于在编程位置形成单个纳米孔。虽然该模型依赖于实验特定参数，但我们预计它可为激光辅助介电击穿法制造纳米孔提供实验见解，从而更广泛地实现固态纳米孔及其传感应用。
