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基于超紧凑型硅微腔的改进型迈克尔逊干涉仪高温传感器。

Ultra-compact silicon-microcap based improved Michelson interferometer high-temperature sensor.

作者信息

Han Yang, Liu Bo, Wu Yongfeng, Mao Yaya, Wu Jing, Zhao Lilong, Nan Tong, Wang Jin, Tang Rong, Zhang Yulan, Liu Yan

出版信息

Opt Express. 2021 Mar 1;29(5):6703-6713. doi: 10.1364/OE.419260.

Abstract

An ultra-short high-temperature fiber-optic sensor based on a silicon-microcap created by a single-mode fiber (SMF) and simple fusion splicing technology is proposed and experimentally demonstrated. A section of the SMF with a silicon-microcap at one end is connected to the "peanut" structure to build the microcap-based optical fiber improved Michelson interferometer (MI). The optimal discharge parameters of microcap and length of SMF has been investigated to achieve the best extinction ratio of 6.61 dB. The size of this microcap-based improved MI sensor is 560 µm and about 18 times shorter compared to the current fiber tip interferometers (about 10 mm). Meanwhile, it showed good robustness during the two heating-cooling cycles and the duration period stability test at 900 °C. This microcap-based improved MI sensor with the smaller size, simple fabrication, low cost, high reliability, and good linearity within a large dynamic range is beneficial to practical temperature measurement and massive production.

摘要

提出并通过实验演示了一种基于由单模光纤(SMF)和简单熔接技术制成的硅微帽的超短高温光纤传感器。将一端带有硅微帽的一段SMF连接到“花生”结构上,构建基于微帽的光纤改进型迈克尔逊干涉仪(MI)。研究了微帽的最佳放电参数和SMF的长度,以实现6.61 dB的最佳消光比。这种基于微帽的改进型MI传感器的尺寸为560 µm,与当前的光纤尖端干涉仪(约10 mm)相比短约18倍。同时,在900 °C的两个加热-冷却循环和持续时间稳定性测试中,它表现出良好的稳健性。这种基于微帽的改进型MI传感器尺寸更小、制造简单、成本低、可靠性高,并且在大动态范围内具有良好的线性度,有利于实际温度测量和大规模生产。

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