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使用自组装微机电系统致动器的柔性可控超材料器件

Flexible and Controllable Metadevice Using Self-Assembly MEMS Actuator.

作者信息

Xu Ruijia, Lin Yu-Sheng

机构信息

School of Electronics and Information Technology, Sun Yat-Sen University, Guangzhou 510006, China.

出版信息

Nano Lett. 2021 Apr 14;21(7):3205-3210. doi: 10.1021/acs.nanolett.1c00391. Epub 2021 Apr 1.

DOI:10.1021/acs.nanolett.1c00391
PMID:33792316
Abstract

In this work, an actively tunable optical metadevice is proposed to realize multifunctional application by integrating self-assembly electrothermal actuator (ETA) and magnetic metamaterial. The released frame of ETA can control the deformed height of the metamaterial plate and then provide high robustness. By driving the external electromagnetic field, the metamaterial plate is actuated and rotated by a magnetic force to manipulate the incident electromagnetic response. The transmission intensities of the metadevice can be gradually increased to characterize "on" and "off" states. Along with the inputs of light source and magnetic field, the transmission results of the metadevice could provide the output of time-difference optical signal and then carry with digital information in the further optical logic operation. Such an actuation method provides an ideal platform for actively tunable metamaterial with a large tilt angle and displacement. MEMS-based metamaterial is a strategy to open an avenue for optical communication, 3D imaging, and optical logic switching applications.

摘要

在这项工作中,提出了一种主动可调谐光学超材料器件,通过集成自组装电热致动器(ETA)和磁性超材料来实现多功能应用。ETA的释放框架可以控制超材料板的变形高度,进而提供高稳健性。通过驱动外部电磁场,超材料板受到磁力驱动而旋转,以操纵入射电磁响应。该超材料器件的传输强度可逐渐增加,以表征“开”和“关”状态。随着光源和磁场的输入,该超材料器件的传输结果可提供时差光信号输出,进而在进一步的光学逻辑运算中携带数字信息。这种致动方法为具有大倾斜角和位移的主动可调谐超材料提供了一个理想平台。基于微机电系统(MEMS)的超材料是为光通信、3D成像和光逻辑开关应用开辟道路的一种策略。

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