Zhou Shengru, Liang Chao, Mei Ziqi, Xie Rongbo, Sun Zhenci, Li Ji, Zhang Wenqiang, Ruan Yong, Zhao Xiaoguang
School of Instrumental Science and Opto-Electronics Engineering, Beijing Information Science Technology University, Beijing 100192, China.
Department of Precision Instrument, Tsinghua University, Beijing 100084, China.
Micromachines (Basel). 2024 Jan 31;15(2):219. doi: 10.3390/mi15020219.
Actuators play a crucial role in microelectromechanical systems (MEMS) and hold substantial potential for applications in various domains, including reconfigurable metamaterials. This research aims to design, fabricate, and characterize structures for the actuation of the EMA. The electromagnetic actuator overcomes the lack of high drive voltage required by other actuators. The proposed actuator configuration comprises supporting cantilever beams with fixed ends, an integrated coil positioned above the cantilever's movable plate, and a permanent magnet located beneath the cantilever's movable plate to generate a static magnetic field. Utilizing flexible polyimide, the fabrication process of the EMA is simplified, overcoming limitations associated with silicon-based micromachining techniques. Furthermore, this approach potentially enables large-scale production of EMA, with displacement reaching up to 250 μm under a 100 mA current, thereby expanding their scope of applications in manufacturing. To demonstrate the function of the EMA, we integrated it with a metamaterial structure to form a compact, tunable terahertz absorber, demonstrating a potential for reconfigurable electromagnetic space.
致动器在微机电系统（MEMS）中起着至关重要的作用，在包括可重构超材料在内的各个领域都具有巨大的应用潜力。本研究旨在设计、制造和表征用于电机械致动器（EMA）驱动的结构。电磁致动器克服了其他致动器所需高驱动电压的不足。所提出的致动器配置包括具有固定端的支撑悬臂梁、位于悬臂可动板上方的集成线圈以及位于悬臂可动板下方以产生静磁场的永磁体。利用柔性聚酰亚胺，简化了EMA的制造工艺，克服了与基于硅的微加工技术相关的限制。此外，这种方法有可能实现EMA的大规模生产，在100 mA电流下位移可达250μm，从而扩大其在制造领域的应用范围。为了演示EMA的功能，我们将其与超材料结构集成，形成了一个紧凑、可调谐的太赫兹吸收器，展示了可重构电磁空间的潜力。
