Method for exposure dose monitoring and control in scanning beam interference lithography.

To improve grating manufacturing process controllability in scanning beam interference lithography (SBIL), a novel method for exposure dose monitoring and control is proposed. Several zones in a narrow monitoring region are fabricated on a grating substrate by piecewise uniform scanning. Two monitoring modes are given based on the different widths of the monitoring region. The monitoring curve of the latent image diffraction efficiency to scanning velocity is calculated by rigorous coupled wave analysis. The calculation results show that the exposure dose in SBIL can be monitored by the shape change of the monitoring curve, and an optimized scanning velocity can be selected in the monitoring curve to control the exposure dose.