Han Tae-Hee, Bak So-Young, Kim Sangwoo, Lee Se Hyeong, Han Ye-Ji, Yi Moonsuk
Department of Smart Interdisciplinary Engineering, Pusan National University, Busan 46241, Korea.
Department of Electronics Engineering, Pusan National University, Busan 46241, Korea.
Sensors (Basel). 2021 Mar 17;21(6):2103. doi: 10.3390/s21062103.
This paper introduces a method for improving the sensitivity to NO gas of a p-type metal oxide semiconductor gas sensor. The gas sensor was fabricated using CuO nanowires (NWs) grown through thermal oxidation and decorated with ZnO nanoparticles (NPs) using a sol-gel method. The CuO gas sensor with a ZnO heterojunction exhibited better sensitivity to NO gas than the pristine CuO gas sensor. The heterojunction in CuO/ZnO gas sensors caused a decrease in the width of the hole accumulation layer (HAL) and an increase in the initial resistance. The possibility to influence the width of the HAL helped improve the NO sensing characteristics of the gas sensor. The growth morphology, atomic composition, and crystal structure of the gas sensors were analyzed using field-emission scanning electron microscopy (FE-SEM), energy-dispersive X-ray spectroscopy, and X-ray diffraction, respectively.
本文介绍了一种提高p型金属氧化物半导体气体传感器对NO气体灵敏度的方法。该气体传感器是利用通过热氧化生长的CuO纳米线(NWs)制备的,并采用溶胶-凝胶法用ZnO纳米颗粒(NPs)进行修饰。具有ZnO异质结的CuO气体传感器对NO气体的灵敏度比原始CuO气体传感器更高。CuO/ZnO气体传感器中的异质结导致空穴积累层(HAL)宽度减小,初始电阻增加。影响HAL宽度的可能性有助于改善气体传感器的NO传感特性。分别使用场发射扫描电子显微镜(FE-SEM)、能量色散X射线光谱和X射线衍射对气体传感器的生长形态、原子组成和晶体结构进行了分析。