Lemieux-Leduc Cédric, Guertin Régis, Bianki Marc-Antoine, Peter Yves-Alain
Opt Express. 2021 Mar 15;29(6):8685-8697. doi: 10.1364/OE.417703.
Sensitivity of polymeric microdisks is evaluated for selected compounds in their vapor phase such as humidity, isopropanol, toluene, limonene, 1-butanol, and pentanoic acid (valeric acid). Among these compounds, pentanoic acid exhibits the highest sensitivity (23 pm/ppm) with a limit of detection estimated to be around 0.6 ppm. We are interested in the contribution of the geometry deformation due to polymer swelling on the sensitivity as it may be engineered to improve performance of gas sensing devices. Experimental observations show a trend where sensitivity to humidity increased with the ratio of the undercut over the radius of the microcavity.
对聚合物微盘在其气相中对选定化合物（如湿度、异丙醇、甲苯、柠檬烯、正丁醇和戊酸）的灵敏度进行了评估。在这些化合物中，戊酸表现出最高的灵敏度（23 pm/ppm），估计检测限约为0.6 ppm。我们感兴趣的是聚合物溶胀引起的几何变形对灵敏度的贡献，因为可以通过设计来提高气体传感装置的性能。实验观察结果显示出一种趋势，即对湿度的灵敏度随着微腔底切与半径之比的增加而增加。
