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用于正电子发射断层扫描系统的宽带高反射率多层膜的研制。

Development of broad-band high-reflectivity multilayer film for positron emission tomography system.

作者信息

Xu J, Sun Q, Wu Z, Guo L, Xie S, Huang Q, Peng Q

机构信息

The State Key Lab of Digital Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan, 430074, Hubei, 430074, China.

Independent researcher.

出版信息

J Instrum. 2018;13(9). doi: 10.1088/1748-0221/13/09/p09016. Epub 2018 Sep 18.

Abstract

The use of non-ideal reflective materials and low-precision manual manufacturing technologies is a fundamental technical obstacle blocking the positron emission tomography (PET) systems from achieving better performances. We propose to address that long-standing obstacle with advanced multilayer dielectric coating technologies. We designed an broad-band multilayer high-reflectivity (HR) film that can be coated directly on the surface of ultra-precision polished lutetiumyttrium oxyorthosilicate (LYSO) scintillators. The film consists of 48 layers of TiO2/SiO2/HfO2 which are deposited on LYSO scintillator crystal alternately using the electron beam evaporation method. The overall thickness of the HR film is about 3μm. The HR film combines 3 quarter wavelength reflective films, with the central wavelengths of 365 nm, 430 nm and 570 nm respectively, to match the emission spectrum of the LYSO scintillator. The optical experimental results show that the HR film achieved an excellent average reflectivity of 99.50% at 8° incident angle for incident lights with wavelengths between 360 to 620 nm. The average reflectivity at 60° incident angle is higher than 90%. The results of the hardness experiments and the adhesive strength experiments show that the HR film has an excellent mechanical strength. The HR coating technology developed in this study is very attractive because it allows to "print" high-performance reflectors on a scintillator directly with high-precision, instead of manually gluing reflective films on the scintillator. Thus, we conclude that the HR film provides a viable solution to the long standing technical bottleneck that limits the development of high-performance detectors for advanced PET imaging.

摘要

使用非理想的反射材料和低精度的手工制造技术是阻碍正电子发射断层扫描(PET)系统实现更好性能的一个基本技术障碍。我们建议用先进的多层介质涂层技术来解决这一长期存在的障碍。我们设计了一种宽带多层高反射率(HR)薄膜,它可以直接涂覆在超精密抛光的硅酸镥钇(LYSO)闪烁体表面。该薄膜由48层TiO2/SiO2/HfO2组成,采用电子束蒸发法交替沉积在LYSO闪烁体晶体上。HR薄膜的总厚度约为3μm。HR薄膜结合了3个四分之一波长反射膜,中心波长分别为365nm、430nm和570nm,以匹配LYSO闪烁体的发射光谱。光学实验结果表明,对于波长在360至620nm之间的入射光,HR薄膜在8°入射角下实现了99.50%的优异平均反射率。在60°入射角下的平均反射率高于90%。硬度实验和附着力实验结果表明,HR薄膜具有优异的机械强度。本研究开发的HR涂层技术非常有吸引力,因为它允许直接在闪烁体上高精度地“打印”高性能反射器,而不是手动将反射膜粘贴在闪烁体上。因此,我们得出结论,HR薄膜为限制先进PET成像高性能探测器发展的长期技术瓶颈提供了一个可行的解决方案。

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