Delipinar Tugce, Shafique Atia, Gohar Maryam Sepehri, Yapici Murat Kaya
Faculty of Engineering and Natural Sciences, Sabanci University, Istanbul 34956, Turkey.
Flexible Electronics R&D Platform, Kordsa, Izmit 41310, Turkey.
ACS Omega. 2021 Mar 25;6(13):8744-8753. doi: 10.1021/acsomega.0c06106. eCollection 2021 Apr 6.
In the past decade, humidity measurements have ubiquitously gained consideration in the wide range of application paradigms such as industrial predictive maintenance, instrumentation, automation, agriculture, climate monitoring, healthcare, and semiconductor industries. Accurate humidity measurements and cost-effective fabrication processes for large-volume and high-performance sensors with flexible form factors are essential to meet the stringent performance requirements of the emerging application areas. To address this need, recent efforts focus on development of innovative sensing modalities, process technologies, and exploration and integration of new materials to enable low-cost, robust, and flexible humidity sensors with ultrahigh sensitivity and linearity, large dynamic range, low hysteresis, and fast response time. In this review paper, we present an overview of flexible humidity sensors based on distinct sensing mechanisms, employed processing techniques, and various functional sensing layers and substrate materials for specific applications. Furthermore, we present the critical device design parameters considered to be indicative of sensor performance such as relative humidity range, along with a discussion on some of the specific applications and use cases.
在过去十年中，湿度测量在广泛的应用领域中普遍受到关注，如工业预测性维护、仪器仪表、自动化、农业、气候监测、医疗保健和半导体行业。对于具有灵活外形的大批量高性能传感器而言，精确的湿度测量和具有成本效益的制造工艺对于满足新兴应用领域严格的性能要求至关重要。为满足这一需求，近期的工作重点是开发创新的传感方式、工艺技术，以及探索和集成新材料，以实现具有超高灵敏度和线性度、大动态范围、低滞后和快速响应时间的低成本、坚固且灵活的湿度传感器。在这篇综述论文中，我们概述了基于不同传感机制、所采用的处理技术以及用于特定应用的各种功能传感层和基底材料的柔性湿度传感器。此外，我们还介绍了被认为可指示传感器性能的关键器件设计参数，如相对湿度范围，并讨论了一些具体应用和用例。
