Wang Renjie, Cheng Shaobo, Vanka Srinivas, Botton Gianluigi A, Mi Zetian
Department of Electrical and Computer Engineering, McGill University, 3480 University Street, Montreal, QC H3A 0E9, Canada.
Department of Materials Science and Engineering, Canadian Centre for Electron Microscopy, McMaster University, 1280 Main Street West, Hamilton, ON L8S 4 M1, Canada.
Nanoscale. 2021 May 6;13(17):8163-8173. doi: 10.1039/d1nr00468a.
To pave the way for InGaN-on-Si integrated photovoltaics, uniform and close-packed n-GaN/(Al)InGaN/p-GaN nanowire (NW) arrays with a ∼0.29 μm thick absorption segment of ∼2.35 eV energy bandgap were fabricated on a Si substrate using Ti-mask selective area growth (SAG) in a molecular beam epitaxy (MBE) chamber. Instead of using thick and insulting buffer layers, this SAG process was realized by employing a 3 nm AlN/GaN: Ge buffer layer to facilitate electrical and thermal conduction between NWs and Si. Scanning transmission electron microscopy and high-resolution electron energy loss spectroscopy mapping revealed the discontinuities of AlN and the embedments of GaN:Ge which contribute to a negligible resistance of the NWs-on-Si interface. AlInGaN active segment exhibits core-shell structures, which suppress nonradiative surface recombination at NW surfaces. Working of AlInGaN core-shell NW solar cells was demonstrated with improved open-circuit voltage (Voc) and higher energy conversion efficiency (η) than those reported for InGaN NW solar cells. Stable output characteristics including the Voc of 1.41 V and η of 2.46% were obtained under 30-Sun illuminations. Such NWs-on-Si devices use Si substrate as the bottom electrode. With a low series resistance of ∼1 Ω, this work paves the way to monolithically integrate MBE-SAG III-nitride devices and Si-based electronics, such as Si solar cells and CMOS devices.
为了为硅基氮化铟镓集成光伏铺平道路,利用分子束外延(MBE)腔室中的钛掩膜选择性区域生长(SAG),在硅衬底上制备了具有约2.35 eV能带隙、约0.29μm厚吸收段的均匀且紧密排列的n型氮化镓/(铝)铟镓氮/p型氮化镓纳米线(NW)阵列。该SAG工艺并非使用厚的绝缘缓冲层,而是通过采用3nm的氮化铝/掺锗氮化镓缓冲层来实现,以促进纳米线与硅之间的电传导和热传导。扫描透射电子显微镜和高分辨率电子能量损失谱映射揭示了氮化铝的不连续性以及掺锗氮化镓的嵌入,这使得硅基纳米线界面的电阻可忽略不计。铟镓铝氮有源段呈现核壳结构,可抑制纳米线表面的非辐射表面复合。实验证明了铟镓铝氮核壳纳米线太阳能电池的工作情况,其开路电压(Voc)有所改善,能量转换效率(η)高于报道的氮化铟镓纳米线太阳能电池。在30倍太阳光照射下,获得了包括1.41V的Voc和2.46%的η在内的稳定输出特性。这种硅基纳米线器件使用硅衬底作为底部电极。该工作以约1Ω的低串联电阻,为将MBE - SAG III族氮化物器件与硅基电子器件(如硅太阳能电池和CMOS器件)进行单片集成铺平了道路。