Thanasekaran Pounraj, Su Cing-Huei, Liu Yen-Hsiang, Lu Kuang-Lieh
Department of Chemistry, Fu Jen Catholic University, New Taipei City, 242, Taiwan.
Institute of Chemistry, Academia Sinica, Taipei, 115, Taiwan.
Chemistry. 2021 Dec 1;27(67):16543-16563. doi: 10.1002/chem.202100241. Epub 2021 Aug 12.
The extraordinary characteristic features of metal-organic frameworks (MOFs) make them applicable for use in a variety of fields but their conductivity in microelectronics over a wide relative humidity (RH) range has not been extensively explored. To achieve good performance, MOFs must be stable in water, i. e., under humid conditions. However, the design of ultrastable hydrophobic MOFs with high conductivity for use in microelectronics as conducting and dielectric materials remains a challenge. In this Review, we discuss applications of an emerging class of hydrophobic MOFs with respect to their use as active sensor coatings, tunable low-κ dielectrics and conductivity, which provide high-level roadmap for stimulating the next steps toward the development and implementation of hydrophobic MOFs for use in microelectronic devices. Several methodologies including the incorporation of long alkyl chain and fluorinated linkers, doping of redox-active 7,7,8,8-tetracyanoquinodimethane (TCNQ), the use of guest molecules, and conducting polymers or carbon materials in the pores or surface of MOFs have been utilized to produce hydrophobic MOFs. The contact angle of a water droplet and a coating can be used to evaluate the degree of hydrophobicity of the surface of a MOF. These unique advantages enable hydrophobic MOFs to be used as a highly versatile platform for exploring multifunctional porous materials. Classic representative examples of each category are discussed in terms of coordination structures, types of hydrophobic design, and potential microelectronic applications. Lastly, a summary and outlook as concluding remarks in this field are presented. We envision that future research in the area of hydrophobic MOFs promise to provide important breakthroughs in microelectronics applications.
金属有机框架材料（MOFs）的非凡特性使其适用于各种领域，但它们在宽相对湿度（RH）范围内在微电子领域的导电性尚未得到广泛研究。为了实现良好性能，MOFs必须在水中稳定，即在潮湿条件下稳定。然而，设计用于微电子领域作为导电和介电材料的具有高导电性的超稳定疏水MOFs仍然是一个挑战。在本综述中，我们讨论了一类新兴疏水MOFs作为活性传感器涂层、可调低κ介电材料和导电材料的应用，这为推动用于微电子器件的疏水MOFs的开发和应用的下一步发展提供了高层次路线图。包括引入长烷基链和氟化连接体、掺杂氧化还原活性的7,7,8,8-四氰基对苯二甲烷（TCNQ）、使用客体分子以及在MOFs的孔或表面中引入导电聚合物或碳材料等几种方法已被用于制备疏水MOFs。水滴与涂层的接触角可用于评估MOF表面的疏水程度。这些独特优势使疏水MOFs能够用作探索多功能多孔材料的高度通用平台。我们从配位结构、疏水设计类型和潜在微电子应用等方面讨论了每一类的经典代表性实例。最后，给出了该领域作为总结性评论的总结和展望。我们设想，疏水MOFs领域的未来研究有望在微电子应用方面取得重要突破。
