Su Shujing, Ren Ting, Zhang Lili, Xu Fujia
Science and Technology on Electronic Test & Measurement Laboratory, North University of China, No.3 Xueyuan Road, Taiyuan 030051, China.
Micromachines (Basel). 2021 Apr 19;12(4):459. doi: 10.3390/mi12040459.
A new type of wireless passive, high sensitivity, high temperature sensor was designed to meet the real-time temperature test in the harsh aero-engine environment. The sensor consists of a complementary split ring resonator and a substrate integrated circular waveguide (CSRR-SICW) structure and is based on high temperature resistant SiN ceramic as the substrate material. Temperature is measured by real-time monitoring of the resonant frequency of the sensor. In addition, the ambient temperature affects the dielectric constant of the dielectric substrate, and the resonant frequency of the sensor is determined by the dielectric constant, so the function relationship between temperature and resonant frequency can be established. The experimental results show that the resonant frequency of the sensor decreases from 11.3392 GHz to 11.0648 GHz in the range of 50-1000 °C. The sensitivity is 123 kHz/°C and 417 kHz/°C at 50-450 °C and 450-1000 °C, respectively, and the average test sensitivity is 289 kHz/°C. Compared with previously reported high temperature sensors, the average test sensitivity is approximately doubled, and the test sensitivity at 450-1000 °C is approximately three times higher. Therefore, the proposed high sensitivity sensor has promising prospects for high temperature measurement.
为满足在恶劣航空发动机环境下的实时温度测试需求，设计了一种新型无线无源、高灵敏度、高温传感器。该传感器由互补开口谐振环和基片集成圆波导（CSRR-SICW）结构组成，采用耐高温SiN陶瓷作为基片材料。通过实时监测传感器的谐振频率来测量温度。此外，环境温度会影响介电基片的介电常数，而传感器的谐振频率由介电常数决定，因此可以建立温度与谐振频率之间的函数关系。实验结果表明，在50-1000℃范围内，传感器的谐振频率从11.3392GHz降至11.0648GHz。在50-450℃和450-1000℃时的灵敏度分别为123kHz/℃和417kHz/℃，平均测试灵敏度为289kHz/℃。与先前报道的高温传感器相比，平均测试灵敏度提高了约一倍，在450-1000℃时的测试灵敏度提高了约三倍。因此，所提出的高灵敏度传感器在高温测量方面具有广阔的应用前景。
