Kwon Yong Ho, Fernandes Jayer, Kim Jae-Jun, Chen Jiangang, Jiang Hongrui
Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Madison, WI 53706, USA.
Department of Materials Science and Engineering, University of Wisconsin-Madison, Madison, WI 53706, USA.
Micromachines (Basel). 2021 Apr 22;12(5):476. doi: 10.3390/mi12050476.
Commercially available biomedical wearable sensors to measure tensile force/strain still struggle with miniaturization in terms of weight, size, and conformability. Flexible and epidermal electronic devices have been utilized in these applications to overcome these issues. However, current sensors still require a power supply and some form of powered data transfer, which present challenges to miniaturization and to applications. Here, we report on the development of flexible, passive (thus zero power consumption), and biocompatible nanostructured photonic devices that can measure tensile strain in real time by providing an optical readout instead of an electronic readout. Hierarchical silver (Ag) nanostructures in various thicknesses of 20-60 nm were fabricated and embedded on a stretchable substrate using e-beam lithography and a low-temperature dewetting process. The hierarchical Ag nanostructures offer more design flexibility through a two-level design approach. A tensional force applied in one lateral ( or ) direction of the stretchable substrate causes a Poisson contraction in the other, and as a result, a shift in the reflected light of the nanostructures. A clear blue shift of more than 100 nm in peak reflectance in the visible spectrum was observed in the reflected color, making the devices applicable in a variety of biomedical photonic sensing applications.
市售的用于测量拉力/应变的生物医学可穿戴传感器在重量、尺寸和贴合性方面仍难以实现小型化。柔性和表皮电子设备已被用于这些应用中以克服这些问题。然而,当前的传感器仍然需要电源和某种形式的有源数据传输,这对小型化和应用提出了挑战。在此,我们报告了一种柔性、无源(因此零功耗)且生物相容的纳米结构光子器件的开发,该器件可以通过提供光学读数而非电子读数来实时测量拉伸应变。使用电子束光刻和低温去湿工艺制备了各种厚度为20 - 60 nm的分级银(Ag)纳米结构,并将其嵌入到可拉伸基板上。分级Ag纳米结构通过两级设计方法提供了更大的设计灵活性。在可拉伸基板的一个横向(或)方向上施加的拉力会在另一个方向上引起泊松收缩,结果导致纳米结构反射光的偏移。在反射颜色中观察到可见光谱中峰值反射率有超过100 nm的明显蓝移,这使得该器件适用于各种生物医学光子传感应用。