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质子交换膜水电解槽的持续效应测试与内部微观监测

Persistent Effect Test and Internal Microscopic Monitoring for PEM Water Electrolyzer.

作者信息

Lee Chi-Yuan, Chen Chia-Hung, Jung Guo-Bin, Zheng Yu-Xiang, Liu Yi-Cheng

机构信息

Yuan Ze Fuel Cell Center, Department of Mechanical Engineering, Yuan Ze University, Taoyuan 32003, Taiwan.

HOMYTECH Global Co., Ltd., Taoyuan 33464, Taiwan.

出版信息

Micromachines (Basel). 2021 Apr 27;12(5):494. doi: 10.3390/mi12050494.

DOI:10.3390/mi12050494
PMID:33925429
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8145624/
Abstract

As the environmental considerations rise all over the world and under the drive of renewable energy policy, the society of hydrogen energy will come out gradually in the future. The proton exchange membrane water electrolyzer (PEMWE) is a very good hydrogen generator, characterized by low cost, high efficiency and zero emission of greenhouse gases. In this study, the micro temperature, humidity, flow, pressure, voltage, and current sensors were successfully integrated on a 50 μm thick Polyimide (PI) substrate by using micro-electro-mechanical systems (MEMS) technology. After the optimal design and process optimization of the flexible 6-in-1 microsensor, it was embedded in the PEMWE for a 500-h persistent effect test and internal real-time microscopic monitoring.

摘要

随着全球对环境问题的关注度不断提高，在可再生能源政策的推动下，氢能社会将在未来逐渐兴起。质子交换膜水电解槽（PEMWE）是一种非常好的氢气发生器，具有成本低、效率高和温室气体零排放的特点。在本研究中，利用微机电系统（MEMS）技术成功地将微温度、湿度、流量、压力、电压和电流传感器集成在50μm厚的聚酰亚胺（PI）基板上。经过对柔性六合一微传感器的优化设计和工艺优化后，将其嵌入PEMWE中进行500小时的持续效果测试和内部实时微观监测。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/297a/8145624/64c5229e6210/micromachines-12-00494-g020.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/297a/8145624/64c5229e6210/micromachines-12-00494-g020.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/297a/8145624/d9173b4a96b3/micromachines-12-00494-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/297a/8145624/4bcda0fdb0df/micromachines-12-00494-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/297a/8145624/c18946ae5a4b/micromachines-12-00494-g003.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/297a/8145624/57f639d9c0a8/micromachines-12-00494-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/297a/8145624/a367ccb8a9a0/micromachines-12-00494-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/297a/8145624/c6d68ab92347/micromachines-12-00494-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/297a/8145624/fe1e3088d9f8/micromachines-12-00494-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/297a/8145624/22ae73a107fc/micromachines-12-00494-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/297a/8145624/a1060ddf6c50/micromachines-12-00494-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/297a/8145624/7948c114555f/micromachines-12-00494-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/297a/8145624/81eaad7d50dc/micromachines-12-00494-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/297a/8145624/dab887184402/micromachines-12-00494-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/297a/8145624/1addf3b0773b/micromachines-12-00494-g015.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/297a/8145624/c84eed740ea4/micromachines-12-00494-g016.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/297a/8145624/d5b154f825f4/micromachines-12-00494-g017.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/297a/8145624/82f786fbaf71/micromachines-12-00494-g018.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/297a/8145624/7523b2e75230/micromachines-12-00494-g019.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/297a/8145624/64c5229e6210/micromachines-12-00494-g020.jpg

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