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用于模式透明空间操纵的CMOS兼容集成4f系统。

CMOS-compatible integrated 4-f system for mode-transparent spatial manipulation.

作者信息

Qi Wei, Chen Chao, Yu Yu, Zhang Xinliang

出版信息

Opt Lett. 2021 May 1;46(9):2220-2223. doi: 10.1364/OL.417037.

Abstract

To exploit spatial dimension, on-chip optical modes with various spatial profiles have been utilized in optical interconnects and spatial analog computing. An integrated Fourier optical system is able to perform spatial operations. However, the reported schemes based on a subwavelength structure pose difficulty in fabrication, and the fabrication-friendly structure has been investigated only with a fundamental mode. With the complementary metal-oxide-semiconductor process, we propose an integrated 4-f system with simple geometry and a moderate minimum feature size to manipulate the mode's spatial size and position in a mode-transparent way. A size magnification of 2.5 and center-to-center position offset of 7 µm are experimentally demonstrated. Reasonable insertion loss and low inter-mode crosstalk are measured over a 30 nm bandwidth. The work in this Letter paves the way for an on-chip Fourier optical system with convenient fabrication and broadband operation.

摘要

为了利用空间维度,具有各种空间分布的片上光学模式已被用于光互连和空间模拟计算。集成傅里叶光学系统能够执行空间操作。然而,已报道的基于亚波长结构的方案在制造上存在困难,并且仅对基模研究了易于制造的结构。利用互补金属氧化物半导体工艺,我们提出了一种具有简单几何形状和适度最小特征尺寸的集成4-f系统,以模式透明的方式操纵模式的空间尺寸和位置。实验证明了尺寸放大率为2.5以及中心到中心位置偏移为7 µm。在30 nm带宽上测量了合理的插入损耗和低模间串扰。本信函中的工作为具有便捷制造和宽带运行的片上傅里叶光学系统铺平了道路。

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