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基于掺杂聚二甲基硅氧烷的压电超声换能器设计

Design of Piezoelectric Ultrasonic Transducer Based on Doped PDMS.

作者信息

Yang Ran, Liu Wenyi, Gao Wanjia, Kang Dingwei

机构信息

Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China.

出版信息

Sensors (Basel). 2021 Apr 30;21(9):3123. doi: 10.3390/s21093123.

DOI:10.3390/s21093123
PMID:33946276
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8124376/
Abstract

The performance of the ultrasonic transducer will directly affect the accuracy of ultrasonic experimental measurement. Therefore, in order to meet the requirements of a wide band, a kind of annular 2-2-2 piezoelectric composite is proposed based on doped PDMS. In this paper, the transducer structure consisted of PZT-5A piezoelectric ceramics and PDMS doped with 3 wt.% AlO:SiO (1:6) powder, which constituted the piezoelectric composite. MATLAB and COMSOL software were used for simulation. Meanwhile, the electrode materials were selected. Then, the performance of the designed annular 2-2-2 ultrasonic transducer was tested. The simulation results show that when the polymer phase material of the piezoelectric ultrasonic transducer is doped PDMS, the piezoelectric phase and the ceramic substrate account for 70% of the total volume, the polymer phase accounts for 30% of the total volume, and the maximum frequency band width can reach 90 kHz. The experimental results show that the maximum bandwidth of -3 dB can reach 104 kHz when the frequency is 160 kHz. The results of the electrode test show that the use of Cu/Ti electrode improves the electrical conductivity of the single electrode. In this paper, the annular 2-2-2 transducer designed in the case of small volume had the characteristics of a wide frequency band, which was conducive to the miniaturization and integration of the transducer. Therefore, we believe that the annular 2-2-2 piezoelectric composite has broad application prospects.

摘要

超声换能器的性能将直接影响超声实验测量的准确性。因此,为了满足宽频带的要求,提出了一种基于掺杂聚二甲基硅氧烷(PDMS)的环形2-2-2型压电复合材料。本文中,换能器结构由PZT-5A压电陶瓷和掺杂了3 wt.% AlO:SiO(1:6)粉末的PDMS组成,二者构成压电复合材料。使用MATLAB和COMSOL软件进行仿真。同时,选择电极材料。然后,对所设计的环形2-2-2型超声换能器的性能进行测试。仿真结果表明,当压电超声换能器的聚合物相材料为掺杂PDMS时,压电相和陶瓷基底占总体积的70%,聚合物相占总体积的30%,最大频带宽度可达90 kHz。实验结果表明,在频率为160 kHz时,-3 dB的最大带宽可达104 kHz。电极测试结果表明,使用Cu/Ti电极提高了单电极的电导率。本文所设计的小体积环形2-2-2型换能器具有宽频带特性,有利于换能器的小型化和集成化。因此,我们认为环形2-2-2型压电复合材料具有广阔的应用前景。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bd1c/8124376/bdaa44b9a0f0/sensors-21-03123-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bd1c/8124376/69a2e2eb288d/sensors-21-03123-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bd1c/8124376/c97f2d952268/sensors-21-03123-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bd1c/8124376/be7866cce511/sensors-21-03123-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bd1c/8124376/c142c2ac10c5/sensors-21-03123-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bd1c/8124376/e1d90de4d6ce/sensors-21-03123-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bd1c/8124376/acd98fd26938/sensors-21-03123-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bd1c/8124376/a0bcb6674c99/sensors-21-03123-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bd1c/8124376/bdaa44b9a0f0/sensors-21-03123-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bd1c/8124376/69a2e2eb288d/sensors-21-03123-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bd1c/8124376/c97f2d952268/sensors-21-03123-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bd1c/8124376/be7866cce511/sensors-21-03123-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bd1c/8124376/c142c2ac10c5/sensors-21-03123-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bd1c/8124376/e1d90de4d6ce/sensors-21-03123-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bd1c/8124376/acd98fd26938/sensors-21-03123-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bd1c/8124376/a0bcb6674c99/sensors-21-03123-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bd1c/8124376/bdaa44b9a0f0/sensors-21-03123-g008.jpg

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