Zakrzewski A, Jurewicz P, Koruba P, Ćwikła M, Reiner J
Appl Opt. 2021 Apr 10;60(11):3232-3241. doi: 10.1364/AO.421382.
In this paper, the results of experimental characterization of an optical system consisting of a chromatic confocal displacement sensor integrated with an optical laser head are presented. As a result of integration, the part of the optical path of the displacement sensor was combined with the optical path of the laser beam. Consequently, a working distance of 250 mm for the optical system was achieved. The main aim of the characterization was to determine the calibration curve, as well as the application parameters of the system. The methodology for spectral data processing with particular emphasis on the effectiveness of various extraction algorithms is presented. The Lorentzian fitting was considered as the optimal algorithm for the optical system. Consequently, a large measuring range of 10 mm was obtained with perfect linear tendency of the calibration curve. The optical system was characterized by high accuracy equal to ±0.11 of the measuring range, as well as 1 µm resolution. Moreover, the functionality of the system was verified on materials commonly used in laser processing and additive manufacturing. Finally, the system was validated through a comparative measurement with a laser profiler.
本文介绍了一个由集成了光学激光头的彩色共焦位移传感器组成的光学系统的实验表征结果。通过集成，位移传感器的光路部分与激光束的光路相结合。因此，该光学系统实现了250毫米的工作距离。表征的主要目的是确定校准曲线以及系统的应用参数。介绍了光谱数据处理方法，特别强调了各种提取算法的有效性。洛伦兹拟合被认为是该光学系统的最佳算法。因此，获得了10毫米的大测量范围，校准曲线具有完美的线性趋势。该光学系统的特点是高精度，等于测量范围的±0.11，分辨率为1微米。此外，还在激光加工和增材制造中常用的材料上验证了系统的功能。最后，通过与激光轮廓仪的对比测量对系统进行了验证。
