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激光三角法和共焦-比色距离传感器的齿轮形状测量潜力。

Gear Shape Measurement Potential of Laser Triangulation and Confocal-Chromatic Distance Sensors.

机构信息

Bremen Institute for Metrology, Automation and Quality Science, University of Bremen, 28359 Bremen, Germany.

MAPEX Center for Materials and Processes, 330440, University of Bremen, 28334 Bremen, Germany.

出版信息

Sensors (Basel). 2021 Jan 30;21(3):937. doi: 10.3390/s21030937.

DOI:10.3390/s21030937
PMID:33573336
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7866818/
Abstract

The demand for extensive gear shape measurements with single-digit µm uncertainty is growing. Tactile standard gear tests are precise but limited in speed. Recently, faster optical gear shape measurement systems have been examined. Optical gear shape measurements are challenging due to potential deviation sources such as the tilt angles between the surface normal and the sensor axis, the varying surface curvature, and the surface properties. Currently, the full potential of optical gear shape measurement systems is not known. Therefore, laser triangulation and confocal-chromatic gear shape measurements using a lateral scanning position measurement approach are studied. As a result of tooth flank standard measurements, random effects due to surface properties are identified to primarily dominate the achievable gear shape measurement uncertainty. The standard measurement uncertainty with the studied triangulation sensor amounts to >10 µm, which does not meet the requirements. The standard measurement uncertainty with the confocal-chromatic sensor is <6.5 µm. Furthermore, measurements on a spur gear show that multiple reflections do not influence the measurement uncertainty when measuring with the lateral scanning position measurement approach. Although commercial optical sensors are not designed for optical gear shape measurements, standard uncertainties of <10 µm are achievable for example with the applied confocal-chromatic sensor, which indicates the further potential for optical gear shape measurements.

摘要

对具有个位数微米不确定性的广泛齿轮形状测量的需求正在增长。触觉标准齿轮测试精确但速度有限。最近,更快的光学齿轮形状测量系统已经过检查。由于表面法线和传感器轴之间的倾斜角度、表面曲率变化和表面特性等潜在偏差源,光学齿轮形状测量具有挑战性。目前,尚未充分了解光学齿轮形状测量系统的全部潜力。因此,研究了使用横向扫描位置测量方法的激光三角测量和共焦-比色齿轮形状测量。由于齿面标准测量,发现表面特性引起的随机效应主要主导可实现的齿轮形状测量不确定性。研究的三角传感器的标准测量不确定度大于 10 µm,不符合要求。共焦-比色传感器的标准测量不确定度小于 6.5 µm。此外,对直齿轮的测量表明,当使用横向扫描位置测量方法进行测量时,多次反射不会影响测量不确定性。尽管商业光学传感器不是专为光学齿轮形状测量而设计的,但例如,应用的共焦-比色传感器可以实现小于 10 µm 的标准不确定度,这表明光学齿轮形状测量具有进一步的潜力。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/06f8/7866818/8e2b2eb41857/sensors-21-00937-g012.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/06f8/7866818/af7c959ba053/sensors-21-00937-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/06f8/7866818/b08d84019e54/sensors-21-00937-g008.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/06f8/7866818/0908d45a269a/sensors-21-00937-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/06f8/7866818/8e2b2eb41857/sensors-21-00937-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/06f8/7866818/eb59a69fa41f/sensors-21-00937-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/06f8/7866818/422fc21e6a16/sensors-21-00937-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/06f8/7866818/83e6a02ad3bb/sensors-21-00937-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/06f8/7866818/6fcba4415362/sensors-21-00937-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/06f8/7866818/017991930f6e/sensors-21-00937-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/06f8/7866818/72c4c4372c79/sensors-21-00937-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/06f8/7866818/af7c959ba053/sensors-21-00937-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/06f8/7866818/b08d84019e54/sensors-21-00937-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/06f8/7866818/b67cd46fc7ca/sensors-21-00937-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/06f8/7866818/e28590005bbc/sensors-21-00937-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/06f8/7866818/0908d45a269a/sensors-21-00937-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/06f8/7866818/8e2b2eb41857/sensors-21-00937-g012.jpg

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Design and Research of Chromatic Confocal System for Parallel Non-Coaxial Illumination Based on Optical Fiber Bundle.基于光纤束的并行非共轴照明彩色共焦系统的设计与研究。
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