Micro two-dimensional slit-array for super resolution beyond pixel Nyquist limits in grating spectrometers.

This paper presents a new micro 2-D slit-array device for spectral resolution enhancement in grating spectrometers. The 2-D slit-array is encoded in Hadamard matrix and the device is fabricated based on the micro-electromechanical system (MEMS) technology. By just using this 2-D slit-array to replace the single slit in the conventional grating spectrometer, real-time super spectral resolution detection beyond the pixel Nyquist limit, which is determined by the size of the detector pixel, can be realized. Furthermore, no other configuration of the spectrometer is changed, no movable parts are used, and the spectral range and instrument size remain almost unchanged while the resolution is improved. A series of experimental verifications for the feasibility of this design are included in this work.