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微透镜阵列:制造、材料与应用

Microlenses arrays: Fabrication, materials, and applications.

作者信息

Cai Shuxiang, Sun Yalin, Chu Honghui, Yang Wenguang, Yu Haibo, Liu Lianqing

机构信息

School of Electromechanical and Automotive Engineering, Yantai University, Yantai, China.

State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China.

出版信息

Microsc Res Tech. 2021 Nov;84(11):2784-2806. doi: 10.1002/jemt.23818. Epub 2021 May 14.

Abstract

Microlenses have become an indispensable optical element in many optical systems. The advancement of technology has led to a wider variety of microlenses fabrication methods, but these methods suffer from, more or less, some limitations. In this article, we review the manufacturing technology of microlenses from the direct and indirect perspectives. First, we present several fabrication methods and their advantages and disadvantages are discussed. Then, we discuss the commonly used materials for fabricating microlenses and the applications of microlenses in various fields. Finally, we point out the prospects for the future development of microlenses and their fabrication methods.

摘要

微透镜已成为许多光学系统中不可或缺的光学元件。技术的进步导致了种类更多的微透镜制造方法,但这些方法或多或少都存在一些局限性。在本文中,我们从直接和间接的角度综述了微透镜的制造技术。首先,我们介绍几种制造方法,并讨论它们的优缺点。然后,我们讨论用于制造微透镜的常用材料以及微透镜在各个领域的应用。最后,我们指出微透镜及其制造方法未来的发展前景。

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