Parthiban Anupreetha, Gopal Avinash Ashwin Raj, Siwayanan Parthiban, Chew Kit Wayne
School of Energy and Chemical Engineering, Xiamen University Malaysia, Jalan Sunsuria, Bandar Sunsuria, 43900 Sepang, Selangor Darul Ehsan, Malaysia.
TNB Research Sdn. Bhd., Kawasan Institusi Penyelidikan, Jalan Ayer Itam, 43000 Kajang, Selangor Darul Ehsan, Malaysia.
J Hazard Mater. 2021 Sep 5;417:126107. doi: 10.1016/j.jhazmat.2021.126107. Epub 2021 May 14.
Sulfur hexafluoride (SF) is the most potent greenhouse gas contributed by the power and semiconductor industries. The global emissions of gas in the past 10 years have increased tremendously due to lack of disposal routes. This was brought to 190 nations' attention in the Kyoto Protocol for the need of emission control measures to reduce its impacts of climate change and global warming. Various novel techniques have surfaced to tackle this issue, such as non-thermal plasma (NTP) which includes radio frequency plasma, microwave plasma, dielectric barrier discharge, and electron beam. The main by-products resulting from the decomposition of SF by these techniques are sulfur oxyfluorides, sulfur dioxide, hydrofluoric acid, and fluorine gas. This environmental and health effects as well as global emission of SF gas are considered a threat to humans and the climate, where modern disposal methods of contaminated SF gas and its by-products should replace the conventional approaches. Relevant government policies on the safety and disposal concern of SF gas are reviewed and challenges and further research directions for the disposal of SF gas are highlighted in this review article.
六氟化硫（SF₆）是电力和半导体行业排放的最具强效的温室气体。由于缺乏处置途径，过去10年该气体的全球排放量急剧增加。《京都议定书》提请190个国家注意，需要采取排放控制措施，以减少其对气候变化和全球变暖的影响。为解决这一问题，出现了各种新技术，如非热等离子体（NTP），包括射频等离子体、微波等离子体、介质阻挡放电和电子束。这些技术分解SF₆产生的主要副产物是硫的氟氧化物、二氧化硫、氢氟酸和氟气。SF₆气体的这种环境和健康影响以及全球排放被认为对人类和气候构成威胁，现代的受污染SF₆气体及其副产物处置方法应取代传统方法。本文综述了关于SF₆气体安全和处置问题的相关政府政策，并强调了SF₆气体处置面临的挑战和进一步的研究方向。
