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基于单根硅纳米线的紧凑型仿生发状传感器,用于超快速和高灵敏度气流检测。

Compact Biomimetic Hair Sensors Based on Single Silicon Nanowires for Ultrafast and Highly-Sensitive Airflow Detection.

机构信息

Institute of Functional Nano and Soft Materials (FUNSOM), Jiangsu Key Laboratory for Carbon-Based Functional Materials and Devices, Soochow University, Suzhou 215123, Jiangsu, People's Republic of China.

School of Optoelectronic Science and Engineering, Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province, Key Lab of Modern Optical Technologies of Education Ministry of China, Suzhou 215123, Jiangsu People's Republic of China.

出版信息

Nano Lett. 2021 Jun 9;21(11):4684-4691. doi: 10.1021/acs.nanolett.1c00852. Epub 2021 May 29.

DOI:10.1021/acs.nanolett.1c00852
PMID:34053221
Abstract

Wearable sensors that can mimic functionalities of human bodies have attracted intense recent attention. However, research on wearable airflow sensors is still lagging behind. Herein, we report a biomimetic hair sensor based on a single ultralong silicon nanowire (SiNW-BHS) for airflow detection. In our device, the SiNW can provide both mechanical and electrical responses in airflow, which enables a simple and compact design. The SiNW-BHSs can detect airflow with a low detection limit (<0.15 m/s) and a record-high response speed (response time <40 ms). The compact design of the SiNW-BHSs also enables easy integration of an array of devices onto a flexible substrate to mimic human skin to provide comprehensive airflow information including wind speed, incident position, incident angle, and so forth. This work provides novel-designed BHSs for ultrafast and highly sensitive airflow detection, showing great potential for applications such as e-skins, wearable electronics, and robotics.

摘要

可模仿人体功能的可穿戴传感器近来受到了极大关注。然而,可穿戴气流传感器的研究仍相对滞后。在此,我们报道了一种基于单个超长硅纳米线(SiNW-BHS)的仿生发传感器,用于气流检测。在我们的器件中,SiNW 可在气流中提供机械和电气响应,从而实现了简单紧凑的设计。SiNW-BHS 可检测低至 <0.15 m/s 的气流,具有创纪录的高响应速度(响应时间 <40 ms)。SiNW-BHS 的紧凑设计还便于将大量设备集成到柔性基板上,以模仿人类皮肤,从而提供全面的气流信息,包括风速、入射位置、入射角度等。这项工作为超快速和高灵敏度气流检测提供了新颖的设计,在电子皮肤、可穿戴电子和机器人等应用中具有巨大潜力。

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