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基于亚波长超材料的高性能片上硅分束器以提高制造容差

High-Performance On-Chip Silicon Beamsplitter Based on Subwavelength Metamaterials for Enhanced Fabrication Tolerance.

作者信息

Fernández de Cabo Raquel, González-Andrade David, Cheben Pavel, Velasco Aitor V

机构信息

Instituto de Óptica Daza de Valdés, Consejo Superior de Investigaciones Científicas (CSIC), 28006 Madrid, Spain.

National Research Council Canada, Ottawa, ON K1A 0R6, Canada.

出版信息

Nanomaterials (Basel). 2021 May 14;11(5):1304. doi: 10.3390/nano11051304.

DOI:10.3390/nano11051304
PMID:34069199
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8156219/
Abstract

Efficient power splitting is a fundamental functionality in silicon photonic integrated circuits, but state-of-the-art power-division architectures are hampered by limited operational bandwidth, high sensitivity to fabrication errors or large footprints. In particular, traditional Y-junction power splitters suffer from fundamental mode losses due to limited fabrication resolution near the junction tip. In order to circumvent this limitation, we propose a new type of high-performance Y-junction power splitter that incorporates subwavelength metamaterials. Full three-dimensional simulations show a fundamental mode excess loss below 0.1 dB in an ultra-broad bandwidth of 300 nm (1400-1700 nm) when optimized for a fabrication resolution of 50 nm, and under 0.3 dB in a 350 nm extended bandwidth (1350-1700 nm) for a 100 nm resolution. Moreover, analysis of fabrication tolerances shows robust operation for the fundamental mode to etching errors up to ±20 nm. A proof-of-concept device provides an initial validation of its operation principle, showing experimental excess losses lower than 0.2 dB in a 195 nm bandwidth for the best-case resolution scenario (i.e., 50 nm).

摘要

高效功率分配是硅光子集成电路中的一项基本功能,但目前最先进的功率分配架构受到有限的工作带宽、对制造误差的高灵敏度或大尺寸的限制。特别是,传统的Y型结功率分配器由于结尖附近制造分辨率有限而存在基模损耗。为了克服这一限制,我们提出了一种新型的高性能Y型结功率分配器,它集成了亚波长超材料。全三维模拟显示,当针对50nm的制造分辨率进行优化时,在300nm(1400 - 1700nm)的超宽带宽内,基模额外损耗低于0.1dB;对于100nm分辨率,在350nm扩展带宽(1350 - 1700nm)内低于0.3dB。此外,制造公差分析表明,对于高达±20nm的蚀刻误差,基模具有稳健的工作性能。一个概念验证器件对其工作原理进行了初步验证,在最佳分辨率情况(即50nm)下,在195nm带宽内显示出低于0.2dB的实验额外损耗。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8705/8156219/578ccab298c8/nanomaterials-11-01304-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8705/8156219/f7451ca6b7b6/nanomaterials-11-01304-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8705/8156219/9235f939ce56/nanomaterials-11-01304-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8705/8156219/0a056b989afb/nanomaterials-11-01304-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8705/8156219/f7a4009a14b0/nanomaterials-11-01304-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8705/8156219/4b4822419300/nanomaterials-11-01304-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8705/8156219/a2d07520b866/nanomaterials-11-01304-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8705/8156219/578ccab298c8/nanomaterials-11-01304-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8705/8156219/f7451ca6b7b6/nanomaterials-11-01304-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8705/8156219/9235f939ce56/nanomaterials-11-01304-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8705/8156219/0a056b989afb/nanomaterials-11-01304-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8705/8156219/f7a4009a14b0/nanomaterials-11-01304-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8705/8156219/4b4822419300/nanomaterials-11-01304-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8705/8156219/a2d07520b866/nanomaterials-11-01304-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8705/8156219/578ccab298c8/nanomaterials-11-01304-g007.jpg

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本文引用的文献

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On-chip Fourier-transform spectrometers and machine learning: a new route to smart photonic sensors.片上傅里叶变换光谱仪和机器学习:智能光子传感器的新途径。
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Polarization- and wavelength-agnostic nanophotonic beam splitter.偏振和波长无关的纳米光子分束器。
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Ultracompact and broadband silicon-based TE-pass 1 × 2 power splitter using subwavelength grating couplers and hybrid plasmonic gratings.
采用亚波长光栅耦合器和混合等离子体光栅的超紧凑型宽带硅基横电模1×2功率分配器。
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