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用于评估具有不对称金属接触的垂直二极管中金属与二维半导体界面的高效实验方法。

Highly Efficient Experimental Approach to Evaluate Metal to 2D Semiconductor Interfaces in Vertical Diodes with Asymmetric Metal Contacts.

作者信息

Kim Seonyeong, Shin Dong Hoon, Kim Yong-Sung, Lee In Ho, Lee Chang-Won, Seo Sunae, Jung Suyong

机构信息

Interdisciplinary Materials Measurement Institute, Korea Research Institute of Standards and Science, Daejeon 34113, Korea (Republic of).

Department of Physics, Sejong University, Seoul 05006, Korea (Republic of).

出版信息

ACS Appl Mater Interfaces. 2021 Jun 16;13(23):27705-27712. doi: 10.1021/acsami.1c07905. Epub 2021 Jun 4.

Abstract

The energy band alignments and associated material properties at the contacts between metal and two-dimensional (2D) semiconducting transition metal dichalcogenide (SCTMD) films determine the important traits in 2D SCTMD-based electronic and optical device applications. In this work, we realize 2D vertical diodes with asymmetric metal-SCTMD contact areas where currents are dominated by the contact-limited charge flows in the transport regimes of Fowler-Nordheim tunneling and Schottky emission. With straightforward current-voltage characteristics, we can accurately evaluate the interface parameters such as Schottky barrier heights and the vertical effective masses of tunneling charges. In particular, the differing contact areas and resultant current rectifications allow us to address specific Schottky barrier locations with respect to the conduction and valence band edges of 2D semiconducting WSe, WS, MoSe, and MoS, thereby determining whether -type holes or -type electrons become the majority charge carriers in the SCTMD devices. We demonstrate that our experimental and analytical approaches can be utilized as a simple but powerful material metrology to qualitatively and quantitatively evaluate various metal-SCTMD contacts.

摘要

金属与二维(2D)半导体过渡金属二硫属化物(SCTMD)薄膜之间接触处的能带排列及相关材料特性,决定了基于2D SCTMD的电子和光学器件应用中的重要特性。在这项工作中,我们实现了具有不对称金属-SCTMD接触区域的2D垂直二极管,在Fowler-Nordheim隧穿和肖特基发射的传输机制中,电流由接触限制的电荷流主导。凭借简单直接的电流-电压特性,我们可以准确评估诸如肖特基势垒高度和隧穿电荷的垂直有效质量等界面参数。特别是,不同的接触面积和由此产生的电流整流特性,使我们能够确定相对于二维半导体WSe、WS、MoSe和MoS的导带和价带边缘的特定肖特基势垒位置,从而确定是p型空穴还是n型电子成为SCTMD器件中的主要电荷载流子。我们证明,我们的实验和分析方法可作为一种简单而强大的材料计量学方法,用于定性和定量评估各种金属-SCTMD接触。

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