Bian Subiao, Cui Changcai, Arteaga Oriol
Appl Opt. 2021 Jun 1;60(16):4964-4971. doi: 10.1364/AO.425899.
A spectroscopic Mueller matrix ellipsometer based on two rotating Fresnel rhomb compensators with a nearly achromatic response and optimal retardance is described. In this instrument, the compensators rotate in a discrete manner instead of continuously rotating, and this allows for a well-conditioned measurement even for low intensity samples. Moreover, in this configuration, the exposure time of the CCD detector can be varied within orders of magnitude without interfering with the dynamics of the compensator rotation. An optimization algorithm determines the optimal set of discrete angles that allows the determination of the Mueller matrix in the presence of noise. The calibration of the instrument is discussed, and examples of experimentally determined Mueller matrices are provided.
描述了一种基于两个具有近似消色差响应和最佳延迟的旋转菲涅耳菱形补偿器的光谱穆勒矩阵椭偏仪。在该仪器中,补偿器以离散方式旋转而非连续旋转,这使得即使对于低强度样品也能进行条件良好的测量。此外,在此配置下,CCD探测器的曝光时间可在几个数量级内变化,而不会干扰补偿器旋转的动态过程。一种优化算法确定了一组最佳离散角度,使得在存在噪声的情况下能够确定穆勒矩阵。讨论了仪器的校准,并提供了实验测定的穆勒矩阵的示例。