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晶格常数对ITO周期性纳米结构衍射透射及发光二极管光提取效率的影响

Lattice Constant Effect on Diffracted Transmission of ITO Periodic Nanostructures and Improvement of the Light Extraction Efficiency of Light-Emitting Diodes.

作者信息

Chen Zhanxu, Ding Runhong, Wu Feng, Wan Wei

机构信息

School of Optoelectronic Engineering, Guangdong Polytechnic Normal University, Guangzhou 510665, China.

出版信息

Micromachines (Basel). 2021 Jun 14;12(6):693. doi: 10.3390/mi12060693.

DOI:10.3390/mi12060693
PMID:34198527
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8231995/
Abstract

We studied the effects of the lattice pitch of indium-doped tin oxide (ITO) periodic nanostructures on the diffracted transmission to improve the light extraction efficiency of light-emitting diodes (LEDs). Periodic hexagonal ITO nanopillars with lattice constants of 600, 800, 1050, 1200, and 1600 nm were fabricated on ITO electrodes. We found that the light extraction efficiency strongly depended on the lattice constant. The LEDs with a lattice constant of 800 nm ITO nanopillars showed an increase in light extraction of 83%. In addition, their electrical properties were not degraded compared to conventional LEDs. The dependence of the extraction efficiency on the lattice constant was also calculated using a 3D finite-difference time-domain (FDTD) method, and this dependence was in good agreement with the experimental measurements. The transmission of each diffraction order and with the total transmission of ITO nanopillars with different lattice constants were calculated using the FDTD method to investigate the enhancement effect.

摘要

我们研究了铟掺杂氧化锡（ITO）周期性纳米结构的晶格间距对衍射透射的影响，以提高发光二极管（LED）的光提取效率。在ITO电极上制备了晶格常数分别为600、800、1050、1200和1600 nm的周期性六边形ITO纳米柱。我们发现光提取效率强烈依赖于晶格常数。晶格常数为800 nm的ITO纳米柱的LED光提取增加了83%。此外，与传统LED相比，它们的电学性能没有下降。还使用三维时域有限差分（FDTD）方法计算了提取效率对晶格常数的依赖性，这种依赖性与实验测量结果吻合良好。使用FDTD方法计算了不同晶格常数的ITO纳米柱的各衍射级透射率和总透射率，以研究增强效果。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a539/8231995/23d0248803a1/micromachines-12-00693-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a539/8231995/6fd77a749092/micromachines-12-00693-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a539/8231995/443134247df4/micromachines-12-00693-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a539/8231995/aa5036c9b2ba/micromachines-12-00693-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a539/8231995/c27440871338/micromachines-12-00693-g004a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a539/8231995/23d0248803a1/micromachines-12-00693-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a539/8231995/6fd77a749092/micromachines-12-00693-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a539/8231995/443134247df4/micromachines-12-00693-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a539/8231995/aa5036c9b2ba/micromachines-12-00693-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a539/8231995/c27440871338/micromachines-12-00693-g004a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a539/8231995/23d0248803a1/micromachines-12-00693-g005.jpg

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