Ao Meng Han, Zheng Si Zheng, Zhong Qi Lan, Zhang Wen Di, Hou Xu, Chai Xiao Jie, Wang Chao, Fan Hao Chen, Lian Jian Wei, Cheng Yan, Wang Jie, Jiang Jun, Jiang An Quan
State Key Laboratory of ASIC & System School of Microelectronics, Fudan University, Shanghai 200433, China.
Department of Engineering Mechanics and Key Laboratory of Soft Machines and Smart Devices of Zhejiang Province, Zhejiang University, Hangzhou 310027, China.
ACS Appl Mater Interfaces. 2021 Jul 21;13(28):33291-33299. doi: 10.1021/acsami.1c08022. Epub 2021 Jul 9.
With the formation of mesa-like cells at their surfaces, LiNbO thin films are useful for integrating high-density domain wall memory. However, the material is too hard and inert to etch the cells with inclined side edges that help to diminish polarization retention. Moreover, etching could damage the ferroelectricity of the film. To overcome these drawbacks in forming memory cells directly, we developed a technique to deposit two gapped electrodes in the film surface, without needing to etch the film. While applying an in-plane write voltage above a coercive voltage, the domain within the gap is reversibly switched along with the creation/erasure of conducting domain walls against the peripheral unswitched domain. This technique enables "on"/"off" current read of the written information. Unfortunately, the switched domain within the gap generally has poor retention and a weak wall current arises from the presence of a strong depolarization field. To overcome this problem, we fabricated a type of embedded electrode that diffuses thickness-wise into the LiNbO thin film to form a parallel-plate-like structure to screen the depolarization field. The switched domains now had good retention and carry large wall currents. Alternatively, without the embedded electrodes, the switched domains within the cells can be stabilized with increasing gap distance above a critical length of 320 nm. The two methods foreshadow the possibility in the future to fabricate damage-free LiNbO memory cells without etching.
由于其表面形成了台面状细胞,铌酸锂薄膜可用于集成高密度畴壁存储器。然而,该材料太硬且惰性太大,无法蚀刻出具有倾斜侧边的细胞,而倾斜侧边有助于减少极化保留。此外,蚀刻可能会破坏薄膜的铁电性。为了直接克服在形成存储单元时的这些缺点,我们开发了一种在薄膜表面沉积两个有间隙电极的技术,而无需蚀刻薄膜。当施加高于矫顽电压的面内写入电压时,间隙内的畴会随着导电畴壁相对于周边未切换畴的产生/擦除而可逆地切换。该技术能够对写入信息进行“开”/“关”电流读取。不幸的是,间隙内切换的畴通常保留性较差,并且由于强去极化场的存在会产生较弱的壁电流。为了克服这个问题,我们制造了一种嵌入式电极,它沿厚度方向扩散到铌酸锂薄膜中,形成类似平行板的结构来屏蔽去极化场。现在,切换的畴具有良好的保留性并携带大的壁电流。或者,在没有嵌入式电极的情况下,通过将间隙距离增加到超过320nm的临界长度,可以稳定单元内切换的畴。这两种方法预示着未来有可能在不蚀刻的情况下制造无损伤的铌酸锂存储单元。