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从透射光谱同时测定亚微米光学聚合物薄膜的折射率和厚度

Simultaneous Determination of Refractive Index and Thickness of Submicron Optical Polymer Films from Transmission Spectra.

作者信息

Bonal Víctor, Quintana José A, Villalvilla José M, Muñoz-Mármol Rafael, Mira-Martínez Jose C, Boj Pedro G, Cruz María E, Castro Yolanda, Díaz-García María A

机构信息

Departamento de Física Aplicada and Instituto Universitario de Materiales de Alicante, Universidad de Alicante, 03080 Alicante, Spain.

Departamento de Óptica, Farmacología y Anatomía and Instituto Universitario de Materiales de Alicante, Universidad de Alicante, 03080 Alicante, Spain.

出版信息

Polymers (Basel). 2021 Jul 31;13(15):2545. doi: 10.3390/polym13152545.

Abstract

High-transparency polymers, called optical polymers (OPs), are used in many thin-film devices, for which the knowledge of film thickness () and refractive index () is generally required. Spectrophotometry is a cost-effective, simple and fast non-destructive method often used to determine these parameters simultaneously, but its application is limited to films where > 500 nm. Here, a simple spectrophotometric method is reported to obtain simultaneously the and of a sub-micron OP film (down to values of a few tenths of a nm) from its transmission spectrum. The method is valid for any OP where the dispersion curve follows a two-coefficient Cauchy function and complies with a certain equation involving at two different wavelengths. Remarkably, such an equation is determined through the analysis of data for a wide set of commercial OPs, and its general validity is demonstrated. Films of various OPs (pristine or doped with fluorescent compounds), typically used in applications such as thin-film organic lasers, are prepared, and and are simultaneously determined with the proposed procedure. The success of the method is confirmed with variable-angle spectroscopic ellipsometry.

摘要

高透明度聚合物,即所谓的光学聚合物(OPs),被用于许多薄膜器件中,对于这些器件,通常需要了解薄膜厚度()和折射率()。分光光度法是一种经济高效、简单快速的非破坏性方法,常用于同时测定这些参数,但其应用仅限于厚度大于500 nm的薄膜。在此,报道了一种简单的分光光度法,可从亚微米OP薄膜的透射光谱中同时获得其厚度和折射率(低至几十分之一纳米的值)。该方法适用于任何OP,其折射率色散曲线遵循双系数柯西函数,并符合涉及两个不同波长下折射率的特定方程。值得注意的是,通过对大量商用OPs的折射率数据进行分析确定了这样一个方程,并证明了其普遍有效性。制备了各种通常用于薄膜有机激光器等应用的OP薄膜(原始的或掺杂有荧光化合物的),并使用所提出的程序同时测定厚度和折射率。该方法的成功通过可变角度光谱椭偏仪得到了证实。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/abd3/8348323/96fe1722be69/polymers-13-02545-g0A1.jpg

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