Ozaki Takashi, Ohta Norikazu, Fujiyoshi Motohiro
Toyota Central R&D Labs. Inc., Nagakute 480-1192, Japan.
Sensors (Basel). 2021 Sep 10;21(18):6077. doi: 10.3390/s21186077.
In recent years, laser scanners have attracted significant attention for applications such as laser radars. However, the establishment of a two-degree-of-freedom scanner that can quasi-statically drive a large mirror with a large deflection angle has proven to be challenging. In this paper, we propose a laser scanner design and fabrication method by combining two unimorph piezoelectric actuators composed of piezoelectric single-crystal Pb(InNb)O-Pb(MgNb)O-PbTiO and a miniature translation-rotation conversion mechanism with flexible polyimide hinges. The size of the entire scanner was 32 mm × 12 mm × 10 mm. We successfully demonstrated that the scanner could achieve a large quasi-static mechanical deflection angle amplitude of 20.5° in two axes with a 6-mm-square mirror.
近年来，激光扫描仪在激光雷达等应用中备受关注。然而，事实证明，建立一种能够以准静态方式驱动大偏转角大镜子的两自由度扫描仪具有挑战性。在本文中，我们提出了一种激光扫描仪的设计与制造方法，该方法将由压电单晶Pb(InNb)O-Pb(MgNb)O-PbTiO组成的两个单压电片式压电致动器与带有柔性聚酰亚胺铰链的微型平移-旋转转换机构相结合。整个扫描仪的尺寸为32毫米×12毫米×10毫米。我们成功证明，该扫描仪使用6毫米见方的镜子在两个轴上可实现20.5°的大准静态机械偏转角幅度。
