Department of Mechanical Engineering, Sogang University, 1 Shinsu-dong, Mapo-gu, Seoul 121-742, Korea.
Sensors (Basel). 2013 Mar 27;13(4):4146-56. doi: 10.3390/s130404146.
This work proposes a two-dimensional (2-D) laser scanning mirror with a novel actuating structure composed of one magnet and two coils. The mirror-actuating device generates decoupled scanning motions about two orthogonal axes by combining two electromagnetic actuators of the conventional moving-coil and the moving-magnet types. We implement a finite element analysis to calculate magnetic flux in the electromagnetic system and experiments using a prototype with the overall size of 22 mm (W) × 20 mm (D) × 15 mm (H) for the mirror size of 8 mm × 8 mm. The upper moving-coil type actuator to rotate only the mirror part has the optical reflection angle of 15.7° at 10 Hz, 90° at the resonance frequency of 60 Hz at ±3 V (±70 mA) and the bandwidth of 91 Hz. The lower moving-magnet type actuator has the optical reflection angle of 16.20° at 10 Hz and 50° at the resonance frequency of 60 Hz at ±5 V (±34 mA) and the bandwidth of 88 Hz. The proposed compact and simple 2-D scanning mirror has advantages of large 2-D angular deflections, wide frequency bandwidth and low manufacturing cost.
这项工作提出了一种具有新颖驱动结构的二维（2-D）激光扫描镜，该结构由一个磁体和两个线圈组成。该镜驱动装置通过组合传统动圈式和动磁式两种电磁致动器，实现了两个正交轴上的解耦扫描运动。我们通过有限元分析来计算电磁系统中的磁通量，并通过使用整体尺寸为 22 毫米（宽）×20 毫米（深）×15 毫米（高）、镜尺寸为 8 毫米×8 毫米的原型进行实验。上部动圈式致动器仅旋转镜部分，在±3 V（±70 mA）时，在 10 Hz 下的光学反射角为 15.7°，在 60 Hz 的谐振频率下为 90°，带宽为 91 Hz。下部动磁式致动器在±5 V（±34 mA）时，在 10 Hz 下的光学反射角为 16.20°，在 60 Hz 的谐振频率下为 50°，带宽为 88 Hz。所提出的紧凑而简单的二维扫描镜具有二维角偏转大、频带宽和制造成本低的优点。
