一种用于MEMS谐振式加速度计的改进型差分温度补偿方法。

An Improved Difference Temperature Compensation Method for MEMS Resonant Accelerometers.

作者信息

Cai Pengcheng, Xiong Xingyin, Wang Kunfeng, Wang Jiawei, Zou Xudong

机构信息

The State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.

School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.

出版信息

Micromachines (Basel). 2021 Aug 27;12(9):1022. doi: 10.3390/mi12091022.

DOI:10.3390/mi12091022

PMID:34577666

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8466711/

Abstract

Resonant accelerometers are promising because of their wide dynamic range and long-term stability. With quasi-digital frequency output, the outputs of resonant accelerometers are less vulnerable to the noise from circuits and ambience. Differential structure is usually adopted in a resonant accelerometer to achieve higher sensitivity to acceleration and to reduce common noise at the same time. Ideally, a resonant accelerometer is only sensitive to external acceleration. However, temperature has a great impact on resonant accelerometers, causing unexcepted frequency drift. In order to cancel out the frequency drift caused by temperature change, an improved temperature compensation method for differential vibrating accelerometers without additional temperature sensors is presented in this paper. Experiment results demonstrate that the temperature sensitivity of the prototype sensor is reduced from 43.16 ppm/°C to 0.83 ppm/°C within the temperature range of -10 °C to 70 °C using the proposed method.

摘要

谐振式加速度计因其宽动态范围和长期稳定性而颇具前景。由于采用准数字频率输出，谐振式加速度计的输出对电路和环境噪声的敏感度较低。谐振式加速度计通常采用差分结构，以实现对加速度更高的灵敏度并同时降低共模噪声。理想情况下，谐振式加速度计仅对外部加速度敏感。然而，温度对谐振式加速度计有很大影响，会导致意外的频率漂移。为了消除温度变化引起的频率漂移，本文提出了一种无需额外温度传感器的差分振动加速度计的改进温度补偿方法。实验结果表明，采用该方法后，原型传感器在-10°C至70°C的温度范围内，温度灵敏度从43.16 ppm/°C降至0.83 ppm/°C。