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基于PZT平板电容检测的MEMS加速度传感器结构设计

Structural Design of MEMS Acceleration Sensor Based on PZT Plate Capacitance Detection.

作者信息

Cui Min, Chuai Senhui, Huang Yong, Liu Yang, Li Jian

机构信息

Shanxi Key Laboratory of Information Detection and Processing, North University of China, Taiyuan 030051, China.

School of Instrumentation and Electronics, North University of China, Taiyuan 030051, China.

出版信息

Micromachines (Basel). 2023 Aug 6;14(8):1565. doi: 10.3390/mi14081565.

DOI:10.3390/mi14081565
PMID:37630101
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10456628/
Abstract

The problem that the fuze overload signal sticks and is not easily identified by the counting layer during the high-speed intrusion of the projectile is an important factor affecting the explosion of the projectile in the specified layer. A three-pole plate dual-capacitance acceleration sensor based on the capacitive sensor principle is constructed in this paper. The modal simulation of the sensor structure is carried out using COMSOL 6.1 simulation software, the structural parameters of the sensor are derived from the mechanical properties of the model, and finally the physical sensor is processed and fabricated using the derived structural parameters. The mechanical impact characteristics of the model under different overloads were investigated using ANSYS/LS-DYNA, and the numerical simulation of the projectile intrusion into the three-layer concrete slab was carried out using LS-DYNA. Under different overload conditions, the sensor was tested using the Machette's hammer test and the output signal of the sensor was obtained. The output signal was analyzed. Finally, a sensor with self-powered output, high output voltage amplitude, and low spurious interference was obtained. The results show that the ceramic capacitive sensor has a reasonable structure, can reliably receive vibration signals, and has certain engineering applications in the intrusion meter layer.

摘要

在弹丸高速侵彻过程中,引信过载信号粘连且不易被计数层识别的问题是影响弹丸在指定层爆炸的重要因素。本文基于电容式传感器原理构建了一种三极板双电容加速度传感器。利用COMSOL 6.1仿真软件对传感器结构进行模态仿真,从模型力学性能推导传感器结构参数,最后根据推导的结构参数加工制作物理传感器。利用ANSYS/LS-DYNA研究模型在不同过载下的力学冲击特性,并用LS-DYNA对弹丸侵彻三层混凝土板进行数值模拟。在不同过载条件下,采用马歇特锤试验对传感器进行测试,获取传感器输出信号并进行分析。最终得到一种具有自供电输出、高输出电压幅值且低杂散干扰的传感器。结果表明,该陶瓷电容式传感器结构合理,能可靠接收振动信号,在侵彻计层具有一定的工程应用价值。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/48cd/10456628/ce885b790895/micromachines-14-01565-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/48cd/10456628/e8485a03e7c1/micromachines-14-01565-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/48cd/10456628/1d932d1c1ed2/micromachines-14-01565-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/48cd/10456628/52cdcb84dfcb/micromachines-14-01565-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/48cd/10456628/5c4c6b6e0452/micromachines-14-01565-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/48cd/10456628/5f0df09c92b0/micromachines-14-01565-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/48cd/10456628/210fac20fc5c/micromachines-14-01565-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/48cd/10456628/af3da45b6cd7/micromachines-14-01565-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/48cd/10456628/5045b087bd1b/micromachines-14-01565-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/48cd/10456628/ce885b790895/micromachines-14-01565-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/48cd/10456628/e8485a03e7c1/micromachines-14-01565-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/48cd/10456628/1d932d1c1ed2/micromachines-14-01565-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/48cd/10456628/52cdcb84dfcb/micromachines-14-01565-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/48cd/10456628/5c4c6b6e0452/micromachines-14-01565-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/48cd/10456628/5f0df09c92b0/micromachines-14-01565-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/48cd/10456628/210fac20fc5c/micromachines-14-01565-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/48cd/10456628/af3da45b6cd7/micromachines-14-01565-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/48cd/10456628/5045b087bd1b/micromachines-14-01565-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/48cd/10456628/ce885b790895/micromachines-14-01565-g009.jpg

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Sensors (Basel). 2021 Feb 9;21(4):1231. doi: 10.3390/s21041231.
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High-G Calibration Denoising Method for High-G MEMS Accelerometer Based on EMD and Wavelet Threshold.
基于经验模态分解和小波阈值的高过载MEMS加速度计高过载校准去噪方法
Micromachines (Basel). 2019 Feb 18;10(2):134. doi: 10.3390/mi10020134.
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A High-Performance Digital Interface Circuit for a High-Q Micro-Electromechanical System Accelerometer.一种用于高Q值微机电系统加速度计的高性能数字接口电路。
Micromachines (Basel). 2018 Dec 19;9(12):675. doi: 10.3390/mi9120675.
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Development of a High-Sensitivity Wireless Accelerometer for Structural Health Monitoring.用于结构健康监测的高灵敏度无线加速度计的研制。
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