皮秒脉冲激光制备CVD金刚石微铣刀的实验研究

Experimental Study on Fabrication of CVD Diamond Micro Milling Tool by Picosecond Pulsed Laser.

作者信息

Xia Yi, He Ning, Li Liang, Zhao Guolong

机构信息

College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China.

出版信息

Micromachines (Basel). 2021 Aug 31;12(9):1058. doi: 10.3390/mi12091058.

DOI:10.3390/mi12091058

PMID:34577702

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8465263/

Abstract

Because of the many advantages of high-precision micromachining, picosecond pulsed lasers (PSPLs) can be used to process chemical-vapor-deposited diamonds (CVD-D). With the appropriate PSPL manufacturing technique, sharp and smooth edges of CVD-D micro tools can be generated. In this study, a PSPL is used to cut CVD-D. To optimize PSPL cutting, the effects of its parameters including fluence, pulse pitch, and wavelength on the cutting results were investigated. The results showed that the wavelength had the greatest impact on the sharpness of CVD-D. With PSPL cutting, sharp cutting edges, and smooth fabricated surfaces of the CVD-D, micro tools were achieved. Finally, the fabrication of CVD-D micro milling tools and micro milling experiments were also demonstrated.

摘要

由于高精度微加工具有诸多优势，皮秒脉冲激光器（PSPL）可用于加工化学气相沉积金刚石（CVD-D）。采用适当的PSPL制造技术，可生成边缘锋利且光滑的CVD-D微工具。在本研究中，使用PSPL切割CVD-D。为优化PSPL切割，研究了其参数（包括能量密度、脉冲间距和波长）对切割结果的影响。结果表明，波长对CVD-D的锋利度影响最大。通过PSPL切割，获得了CVD-D微工具锋利的切削刃和光滑的加工表面。最后，还展示了CVD-D微铣刀的制造及微铣削实验。