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采用脉冲激光沉积的锐钛矿型和金红石型TiO薄膜的光学性质。

Optical properties of anatase and rutile TiO films deposited by using a pulsed laser.

作者信息

Cui Liqi, Wang Weitian

出版信息

Appl Opt. 2021 Sep 20;60(27):8453-8457. doi: 10.1364/AO.437646.

DOI:10.1364/AO.437646
PMID:34612945
Abstract

Transparent titanium dioxide () films were deposited on quartz substrates by using a pulsed-laser deposition technique. The effects of deposition temperatures on the crystalline phases and optical properties of the films were investigated. Phase-pure anatase and rutile films were obtained at temperatures of 600°C and 800°C, respectively. The deposited films were transparent in the visible spectral region, and the linear refractive indices of the films were determined by using the optical transmission spectra. The optical bandgaps were obtained as 3.25 and 3.02 eV for the anatase and rutile films, respectively. The third-order nonlinear optical properties of the films were investigated by using a single-beam -scan method at a wavelength of 532 nm. The values of the nonlinear absorption coefficient and the nonlinear refractive index of the rutile film were determined to be -7.44×10/ and -1.36×10/, respectively, which are greater than those of the anatase film. The metal-oxygen bond lengths based on the bond-orbital theory could be used to explain the results.

摘要

采用脉冲激光沉积技术在石英衬底上沉积了透明二氧化钛()薄膜。研究了沉积温度对薄膜晶相和光学性能的影响。分别在600°C和800°C的温度下获得了纯相锐钛矿型和金红石型薄膜。沉积的薄膜在可见光谱区域是透明的,并且通过使用光学透射光谱来测定薄膜的线性折射率。锐钛矿型和金红石型薄膜的光学带隙分别为3.25和3.02 eV。在波长为532 nm的情况下,采用单光束 -扫描法研究了薄膜的三阶非线性光学性能。金红石型薄膜的非线性吸收系数和非线性折射率的值分别确定为-7.44×10/和-1.36×10/,大于锐钛矿型薄膜的相应值。基于键轨道理论的金属-氧键长可用于解释这些结果。

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