State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, CAS, Shanghai, 200050, P. R. China.
Center of Materials Science and Opto-Electronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, P. R. China.
Small. 2021 Dec;17(49):e2103688. doi: 10.1002/smll.202103688. Epub 2021 Oct 15.
Micro-spectroscopy is a critical instrument for spectrum analysis in various applications such as chemical and biological analysis, environment detection, and hyperspectral imaging. However, current micro-spectral technique requires bulky and costly spectrometer. In this report, a new type of Bloch surface wave (BSW) based micro-spectrometer is proposed. A single silicon nanoparticle sitting on a dielectric multilayer substrate is used to excite the BSW which acts as a nanoscale unknown source. Taking advantage of the dispersion relations of BSWs, an abundant spectrally related database is formed that is useful for spectrum retrieval applications. Back-focal plane images are used to monitor the change of angular spectrum corresponding to the dispersion relationship of Bloch surface waves. Combined with an iterative algorithm, experimental retrieval of visible-range monochromatic and broadband light spectrums can be obtained. The resolution of the spectrometers can reach 2 nm across a wavelength range of 130 nm. The method in this work is CMOS compatible, enabling spectra retrieval for nanoscale radiators and can also be used to measure and retrieve the microscopic spectrum signal rapidly and timely without conventional scanning monochromator spectrometer.
微光谱学是各种应用(如化学和生物分析、环境检测和高光谱成像)中进行光谱分析的关键仪器。然而,目前的微光谱技术需要体积庞大且昂贵的光谱仪。在本报告中,提出了一种新型基于布洛赫表面波(BSW)的微光谱仪。在介电多层基底上放置一个单个硅纳米粒子来激发 BSW,BSW 充当纳米级未知光源。利用 BSW 的色散关系,形成了一个丰富的光谱相关数据库,可用于光谱检索应用。利用背焦面图像来监测与布洛赫表面波色散关系相对应的角谱变化。结合迭代算法,可以获得可见光范围单色和宽带光光谱的实验检索。光谱仪的分辨率在 130nm 的波长范围内可达 2nm。本工作中的方法与 CMOS 兼容,可用于对纳米级辐射器进行光谱检索,也可用于快速、及时地测量和检索微观光谱信号,而无需传统的扫描单色仪光谱仪。