Opt Lett. 2022 Jun 1;47(11):2923-2926. doi: 10.1364/OL.458469.
Reconstructive micro-spectrometers have shown great potential in many fields such as medicine, agriculture, and astronomy. However, the performance of these spectrometers is seriously limited by the spectral varieties of response pixels and anti-noise ability of reconstruction algorithms. In this work, we propose a spectral reconstruction (SR) algorithm, whose anti-noise ability is at least four times better than the current algorithms. A micro-spectrometer is realized by fabricating a large number of Fabry-Perot (FP) micro-filters onto a cheap complementary metal-oxide semiconductor (CMOS) chip for demonstration by using a very high-efficiency technology of nano-imprinting. Nano-imprint technology can complete hundreds of spectral pixels with rich spectral features at one time and with low cost. In cooperation with the SR algorithm, such a micro-spectrometer can have a spectral resolution as high as 3 nm with much lower angular sensitivity than a photonic crystal-based micro-spectrometer. It can obtain the target's spectrum from only a single shot, which has wide applications in spectral analysis etc.
重建型微光谱仪在医学、农业和天文学等许多领域都显示出了巨大的潜力。然而，这些光谱仪的性能受到响应像素的光谱种类和重建算法的抗噪声能力的严重限制。在这项工作中，我们提出了一种光谱重建（SR）算法，其抗噪声能力至少比现有的算法好四倍。我们通过在廉价的互补金属氧化物半导体（CMOS）芯片上制造大量法布里-珀罗（FP）微滤光片，并用非常高效的纳米压印技术来实现微光谱仪，从而进行演示。纳米压印技术可以一次完成数百个具有丰富光谱特征的光谱像素，成本低廉。与 SR 算法相结合，这种微光谱仪的光谱分辨率可以高达 3nm，其角度灵敏度比基于光子晶体的微光谱仪低得多。它只需单次拍摄就可以获得目标的光谱，在光谱分析等领域有广泛的应用。
