Gibson Andrew R, Donkó Zoltán, Alelyani Layla, Bischoff Lena, Hübner Gerrit, Bredin Jérôme, Doyle Scott, Korolov Ihor, Niemi Kari, Mussenbrock Thomas, Hartmann Peter, Dedrick James P, Schulze Julian, Gans Timo, O'Connell Deborah
Institute for Electrical Engineering and Plasma Technology Ruhr-Universität Bochum, Germany.
York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, United Kingdom.
Plasma Sources Sci Technol. 2019 Jan 7;28. doi: 10.1088/1361-6595/aaf535.
Single frequency, geometrically symmetric Radio-Frequency (rf) driven atmospheric pressure plasmas exhibit temporally and spatially symmetric patterns of electron heating, and consequently, charged particle densities and fluxes. Using a combination of phase-resolved optical emission spectroscopy and kinetic plasma simulations, we demonstrate that tailored voltage waveforms consisting of multiple rf harmonics induce targeted disruption of these symmetries. This confines the electron heating to small regions of time and space and enables the electron energy distribution function to be tailored.
单频、几何对称的射频（rf）驱动大气压等离子体呈现出电子加热在时间和空间上的对称模式，因此也呈现出带电粒子密度和通量的对称模式。通过结合相位分辨光发射光谱和动力学等离子体模拟，我们证明由多个射频谐波组成的定制电压波形会有针对性地破坏这些对称性。这将电子加热限制在时间和空间的小区域内，并使电子能量分布函数能够被定制。
