基于高Q值硅微环谐振器的超窄带可调谐滤波器。

Ultra-narrow passband-tunable filter based on a high-Q silicon racetrack resonator.

作者信息

Xu Jin, Zhang Yujia, Guo Xuhan, Huang Qingzhong, Zhang Xinliang, Su Yikai

出版信息

Opt Lett. 2021 Nov 15;46(22):5575-5578. doi: 10.1364/OL.443723.

Abstract

An ultra-narrow narrow passband-tunable optical filter employing a high-Q silicon racetrack resonator is proposed and experimentally demonstrated on a SOI platform. The high-Q silicon racetrack resonator is realized by utilizing the multimode waveguide racetrack, and the Q factor is measured as high as 8.1×10. The structure of the device is based on a thermally tunable Mach-Zehnder interferometer coupled racetrack. The tunability of the bandwidth is realized by tuning the coupling coefficient between the racetrack resonator and the input or output ports. Finally, the bandwidth of the filter can be tuned from 1.92 to 11.00 pm (240 MHz to 1.375 GHz), and the free spectral range is about 0.28 nm (35 GHz), with the footprint of 0.21.

摘要

提出了一种采用高Q值硅环形谐振器的超窄带可调谐光学滤波器，并在硅基绝缘体上硅（SOI）平台上进行了实验验证。高Q值硅环形谐振器通过利用多模波导环形结构实现，测得的品质因数高达8.1×10。该器件的结构基于热可调马赫-曾德尔干涉仪耦合环形谐振器。通过调整环形谐振器与输入或输出端口之间的耦合系数来实现带宽的可调谐性。最后，该滤波器的带宽可从1.92调至11.00皮米（240兆赫兹至1.375吉赫兹），自由光谱范围约为0.28纳米（35吉赫兹），占用面积为0.21。