Advanced mercuric iodide detectors for X-ray microanalysis.

We first present a brief tutorial on Mercuric Iodide (HgI2) detectors and the intimately related topic of near-room temperature ultralow noise preamplifiers. This provides both a physical basis and technological perspective for the topics to follow. We next describe recent advances in HgI2 applications to x-ray microanalysis, including a space probe Scanning Electron Microscope (SEM), Synchrotron x-ray detectors, and energy dispersive detector arrays. As a result of this work, individual detectors can now operate stably for long periods in vacuum, detect soft x-rays to the oxygen K edge at 523 eV, or count at rates exceeding 2x10(5)/sec. The detector packages are small, lightweight, and use low power. Preliminary HgI2 detector arrays of 10 elements with 500eV resolution have also been constructed and operate stably. Finally, we discuss expected advances in HgI2 array technology, including improved resolution, vacuum operation, and the development of soft x-ray transparent encapsulants. Array capabilities include: large active areas, high (parallel) count rate capability and spatial sensitivity. We then consider areas of x-ray microanalysis where the application of such arrays would be advantageous, particularly including elemental microanalysis, via x-ray fluorescence spectroscopy, in both SEMs and in scanning x-ray microscopes. The necessity of high count rate capability as spatial resolution increases is given particular attention in this connection. Finally, we consider the possibility of Extended X-ray Absorption Fine Structure (EXAFS) studies on square micron sized areas, using detector arrays.