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磁控溅射在Ti6Al4V合金上沉积的Mo-MoN纳米复合涂层的结构、力学和摩擦学性能特征

Characteristics of the Structure, Mechanical, and Tribological Properties of a Mo-MoN Nanocomposite Coating Deposited on the Ti6Al4V Alloy by Magnetron Sputtering.

作者信息

Adamiak Stanisław, Bochnowski Wojciech, Dziedzic Andrzej, Szyller Łukasz, Adamiak Dominik

机构信息

College of Natural Sciences, University of Rzeszow, Pigonia 1, 35-310 Rzeszow, Poland.

PlasmaVac, Unit 6 Barnack Ind Estate, Salisbury SP2 0AW, UK.

出版信息

Materials (Basel). 2021 Nov 11;14(22):6819. doi: 10.3390/ma14226819.

DOI:10.3390/ma14226819
PMID:34832219
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8625362/
Abstract

Mo-MoN nanocomposite coating was produced by reactive magnetron sputtering of a molybdenum target, in the atmosphere, of Ar and N gases. Coating was deposited on Ti6Al4V titanium alloy. Presented are the results of analysis of the XRD crystal structure, microscopic SEM, TEM and AFM analysis, measurements of hardness, Young's modulus, and adhesion. Coating consisted of α-Mo phase, constituting the matrix, and γ-MoN reinforcing phase, which had columnar structure. The size of crystallite phases averaged 20.4 nm for the Mo phase and 14.1 nm for the MoN phase. Increasing nitrogen flow rate leads to the fragmentation of the columnar grains and increased hardness from 22.3 GPa to 27.5 GPa. The resulting coating has a low Young's modulus of 230 GPa to 240 GPa. Measurements of hardness and Young's modulus were carried out using the nanoindentation method. Friction coefficient and tribological wear of the coatings were determined with a tribometer, using the multi-cycle oscillation method. Among tested coatings, the lowest friction coefficient was 0.3 and wear coefficient was 10 × 10 m/N∙m. In addition, this coating has an average surface roughness of RMS < 2.4 nm, determined using AFM tests, as well as a good adhesion to the substrate. The dominant wear mechanism of the Mo-MoN coatings was abrasive wear and wear by oxidation. The Mo-MoN coating produced in this work is a prospective material for the elements of machines and devices operating in dry friction conditions.

摘要

通过在氩气和氮气气氛中对钼靶进行反应磁控溅射制备了Mo-MoN纳米复合涂层。涂层沉积在Ti6Al4V钛合金上。给出了XRD晶体结构分析、微观SEM、TEM和AFM分析结果,以及硬度、杨氏模量和附着力的测量结果。涂层由构成基体的α-Mo相和具有柱状结构的γ-MoN增强相组成。Mo相的微晶相尺寸平均为20.4nm,MoN相的微晶相尺寸平均为14.1nm。增加氮气流速会导致柱状晶粒破碎,硬度从22.3GPa增加到27.5GPa。所得涂层的杨氏模量较低,为230GPa至240GPa。使用纳米压痕法进行硬度和杨氏模量的测量。使用摩擦计通过多周期振荡法测定涂层的摩擦系数和摩擦磨损。在测试的涂层中,最低摩擦系数为0.3,磨损系数为10×10 m/N∙m。此外,通过AFM测试确定该涂层的平均表面粗糙度RMS<2.4nm,并且与基材具有良好的附着力。Mo-MoN涂层的主要磨损机制是磨料磨损和氧化磨损。这项工作中制备的Mo-MoN涂层是在干摩擦条件下运行的机器和设备部件的一种有前景的材料。

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