Yi Feng, Grapes Michael D, LaVan David A
National Institute of Standards and Technology, Gaithersburg, MD 20899, USA.
Lawrence Livermore National Laboratory, Livermore, CA 94550, USA.
J Res Natl Inst Stand Technol. 2019 Dec 16;124:1-19. doi: 10.6028/jres.124.021. eCollection 2019.
We report here on the design, fabrication, and calibration of nanocalorimeter sensors used in the National Institute of Standards and Technology (NIST) Nanocalorimetry Measurements Project. These small-scale thermal analysis instruments are produced using silicon microfabrication approaches. A single platinum line serves as both the heater and temperature sensor, and it is made from a 500 μm wide, 100 nm thick platinum trace, suspended on a 100 nm thick silicon nitride membrane for thermal isolation. Supplemental materials to this article (available online) include drawing files and LabVIEW code used in the fabrication and calibration process.
我们在此报告美国国家标准与技术研究院（NIST）纳米量热法测量项目中使用的纳米量热传感器的设计、制造和校准情况。这些小型热分析仪器采用硅微加工方法制造。一条铂线同时用作加热器和温度传感器，它由一条宽500μm、厚100nm的铂迹线制成，悬浮在100nm厚的氮化硅膜上以实现热隔离。本文的补充材料（可在线获取）包括制造和校准过程中使用的绘图文件和LabVIEW代码。
