Department of Mechanical Science and Engineering, University of Illinois Urbana-Champaign, Urbana, IL 61801, USA.
Nanotechnology. 2010 Feb 5;21(5):055503. doi: 10.1088/0957-4484/21/5/055503. Epub 2009 Dec 21.
This paper presents a microcantilever having a microscale heater-thermometer fabricated from doped single crystal silicon that is mounted on a silicon nitride thermal isolation structure. The silicon nitride isolation structure is in turn connected to doped single crystal silicon legs. The cantilever fabrication, its characterization, and its application in thermal nanotopography measurements are presented in this work. The cantilever can reach temperatures over 600 degrees C with a heating power of 4 mW. The cantilever has a thermal resistance that exceeds 10(5) K W(-1) when away from a substrate. Making a contact-mode scan over a silicon calibration grating of height 20 nm, the cantilever has a topography reading sensitivity of 1.3 x 10(-4) nm(-1), and a topography reading resolution of about 7 pm Hz(-1/2). These performance characteristics compare extremely well to published ones for other kinds of cantilevers.
本文提出了一种微悬臂梁，它具有由掺杂单晶硅制成的微尺度加热器-温度计，该温度计安装在氮化硅热隔离结构上。氮化硅隔离结构又与掺杂单晶硅支腿相连。本工作介绍了悬臂梁的制造、表征及其在热纳米形貌测量中的应用。该悬臂梁在 4mW 的加热功率下可达到超过 600°C 的温度。当远离基底时，悬臂梁的热阻超过 10(5) K W(-1)。在高度为 20nm 的硅校准光栅上进行接触模式扫描时，悬臂梁的形貌读取灵敏度为 1.3 x 10(-4)nm(-1)，形貌读取分辨率约为 7 pm Hz(-1/2)。这些性能特征与其他类型悬臂梁的已发表特征相比非常出色。
