Department of Electronic Materials Engineering, Kwangwoon University, Gwangun-ro 20, Nowon-gu, Seoul 01897, Korea.
Molecules. 2021 Nov 29;26(23):7233. doi: 10.3390/molecules26237233.
In this study, we propose the fabrication of sol-gel composite-based flexible and transparent synaptic transistors on polyimide (PI) substrates. Because a low thermal budget process is essential for the implementation of high-performance synaptic transistors on flexible PI substrates, microwave annealing (MWA) as a heat treatment process suitable for thermally vulnerable substrates was employed and compared to conventional thermal annealing (CTA). In addition, a solution-processed wide-bandgap amorphous In-Ga-Zn (2:1:1) oxide (-IGZO) channel, an organic polymer chitosan electrolyte-based electric double layer (EDL), and a high- TaO thin-film dielectric layer were applied to achieve high flexibility and transparency. The essential synaptic plasticity of the flexible and transparent synaptic transistors fabricated with the MWA process was demonstrated by single spike, paired-pulse facilitation, multi-spike facilitation excitatory post-synaptic current (EPSC), and three-cycle evaluation of potentiation and depression behaviors. Furthermore, we verified the mechanical robustness of the fabricated device through repeated bending tests and demonstrated that the electrical properties were stably maintained. As a result, the proposed sol-gel composite-based synaptic transistors are expected to serve as transparent and flexible intelligent electronic devices capable of stable neural operation.
在本研究中,我们提出在聚酰亚胺(PI)基底上制造基于溶胶-凝胶复合的柔性透明突触晶体管。由于低热预算工艺对于在柔性 PI 基底上实现高性能突触晶体管至关重要,因此采用了适用于热敏基底的微波退火(MWA)作为热处理工艺,并与传统的热退火(CTA)进行了比较。此外,还应用了溶液处理的宽带隙非晶态铟镓锌(2:1:1)氧化物(-IGZO)沟道、基于有机聚合物壳聚糖电解质的电双层(EDL)和高 TaO 薄膜介电层,以实现高柔韧性和透明度。通过单脉冲、成对脉冲促进、多脉冲促进兴奋性突触后电流(EPSC)以及增强和抑制行为的三周期评估,证明了采用 MWA 工艺制造的柔性透明突触晶体管具有基本的突触可塑性。此外,我们通过重复弯曲测试验证了所制造器件的机械鲁棒性,并证明其电性能稳定保持。因此,所提出的基于溶胶-凝胶复合的突触晶体管有望成为能够稳定进行神经操作的透明、灵活的智能电子设备。