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基于壳聚糖电解质-TaO 混合电双层的 CMOS 兼容突触晶体管

CMOS-compatible synaptic transistor gated by chitosan electrolyte-TaO hybrid electric double layer.

机构信息

Department of Electronic Materials Engineering, Kwangwoon University, Chambit-Kwan, B 104, Wolgye 1-dong, Nowon-gu, Seoul, 139-701, Korea.

出版信息

Sci Rep. 2020 Sep 23;10(1):15561. doi: 10.1038/s41598-020-72684-2.

Abstract

This study proposes a hybrid electric double layer (EDL) with complementary metal-oxide semiconductor (CMOS) process compatibility by stacking a chitosan electrolyte and a TaO high-k dielectric thin film. Bio-inspired synaptic transistors with excellent electrical stability were fabricated using the proposed hybrid EDL for the gate dielectric layer. The TaO high-k dielectric layer with high chemical resistance, thermal stability, and mechanical strength enables CMOS-compatible patterning processes on biocompatible organic polymer chitosan electrolytes. This technique achieved ion-conduction from the chitosan electrolyte to the In-Ga-Zn oxide (IGZO) channel layer. The on/off current ratio, subthreshold voltage swing, and the field-effect mobility of the fabricated IGZO EDL transistors (EDLTs) exhibited excellent electrical properties of 1.80 × 10, 96 mV/dec, and 3.73 cm/V·s, respectively. A resistor-loaded inverter was constructed by connecting an IGZO EDLT with a load resistor (400 MΩ) in series. This demonstrated good inverter action and responded to the square-wave input signals. Synaptic behaviours such as the hysteresis window and excitatory post-synaptic current (EPSC) variations were evaluated for different DC gate voltage sweep ranges and different AC gate spike stimuli, respectively. Therefore, the proposed organic-inorganic hybrid EDL is expected to be useful for implementing an extremely compact neural architecture system.

摘要

本研究提出了一种通过堆叠壳聚糖电解质和 TaO 高介电常数(high-k)介电薄膜来实现混合电双层(EDL)与互补金属氧化物半导体(CMOS)工艺兼容性的方法。使用所提出的混合 EDL 作为栅介质层,制造了具有优异电稳定性的仿生突触晶体管。具有高化学抗性、热稳定性和机械强度的 TaO 高介电常数层可在生物相容性有机聚合物壳聚糖电解质上实现 CMOS 兼容的图案化工艺。该技术实现了从壳聚糖电解质到铟镓锌氧化物(IGZO)沟道层的离子传导。所制造的 IGZO EDL 晶体管(EDLT)的导通/关断电流比、亚阈值摆幅和场效应迁移率分别表现出优异的电性能,为 1.80×10、96 mV/dec 和 3.73 cm/V·s。通过将 IGZO EDLT 与负载电阻(400 MΩ)串联,构建了电阻负载反相器。这证明了良好的反相器动作,并对方波输入信号做出响应。通过评估不同的直流栅极电压扫描范围和不同的交流栅极尖峰刺激,分别评估了迟滞窗口和兴奋性后突触电流(EPSC)变化等突触行为。因此,所提出的有机-无机混合 EDL 有望用于实现极其紧凑的神经架构系统。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3041/7511302/8e2ae7aaf434/41598_2020_72684_Fig1_HTML.jpg

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