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基于静态测量和非线性状态空间模型对IEC 60318-4耦合器中压电MEMS扬声器总谐波失真的估计

Total Harmonic Distortion of a Piezoelectric MEMS Loudspeaker in an IEC 60318-4 Coupler Estimation Using Static Measurements and a Nonlinear State Space Model.

作者信息

Liechti Romain, Durand Stéphane, Hilt Thierry, Casset Fabrice, Poulain Christophe, Le Rhun Gwenaël, Pavageau Franklin, Kuentz Hugo, Colin Mikaël

机构信息

University Grenoble Alpes, CEA, Leti, F-38000 Grenoble, France.

Laboratoire d'Acoustique de l'Université du Mans, LAUM-UMR 6613 CNRS, Le Mans Université, F-72085 Le Mans, France.

出版信息

Micromachines (Basel). 2021 Nov 24;12(12):1437. doi: 10.3390/mi12121437.

DOI:10.3390/mi12121437
PMID:34945287
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8706518/
Abstract

We propose a method to evaluate the Total Harmonic Distortion generated by a cantilever-based PZT loudspeaker inside an IEC 60318-4 coupler. The model is validated using experimental data of a commercial loudspeaker. Using the time domain equations of the equivalent electrical circuit of the loudspeaker inside the coupler and a state space formulation, the acoustic pressure response is calculated and compared to the measurement of the manufacturer. Next, the stiffness, transduction and capacitance nonlinear functions are evaluated with a Double-Beam Laser Interferometer (DBLI) and a nanoindenter on test devices and on the commercial loudspeaker. By introducing the nonlinear functions into the model as amplitude-dependent parameters, the THD generated by the loudspeaker is calculated and compared to the value provided by the manufacturer. The good agreement between the measurement and the simulation could allow for a rather quick simulation of the performance of similarly designed loudspeakers at the early stage of the design, by only estimating the static linearity of the main nonlinearity sources.

摘要

我们提出了一种方法,用于评估基于悬臂梁的压电陶瓷(PZT)扬声器在IEC 60318-4耦合器内产生的总谐波失真。该模型通过商用扬声器的实验数据进行了验证。利用耦合器内扬声器等效电路的时域方程和状态空间公式,计算了声压响应,并与制造商的测量结果进行了比较。接下来,使用双光束激光干涉仪(DBLI)和纳米压痕仪对测试装置和商用扬声器评估刚度、换能和电容非线性函数。通过将非线性函数作为与振幅相关的参数引入模型,计算了扬声器产生的总谐波失真,并与制造商提供的值进行了比较。测量结果与模拟结果之间的良好一致性使得在设计的早期阶段,仅通过估计主要非线性源的静态线性度,就可以相当快速地模拟类似设计扬声器的性能。

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本文引用的文献

1
Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers.一种利用气室的全硅微机电系统(MEMS)微型扬声器的概念与验证。
Microsyst Nanoeng. 2019 Oct 7;5:43. doi: 10.1038/s41378-019-0095-9. eCollection 2019.
2
Crystallographic contributions to piezoelectric properties in PZT thin films.晶体学对PZT薄膜压电性能的贡献。
Sci Rep. 2019 May 13;9(1):7309. doi: 10.1038/s41598-019-43869-1.
3
Electromechanical coupling and output efficiency of piezoelectric bending actuators.压电弯曲致动器的机电耦合与输出效率
IEEE Trans Ultrason Ferroelectr Freq Control. 1999;46(3):638-46. doi: 10.1109/58.764850.
4
Perceived naturalness of spectrally distorted speech and music.频谱失真语音和音乐的感知自然度。
J Acoust Soc Am. 2003 Jul;114(1):408-19. doi: 10.1121/1.1577552.