音频范围微机械声学换能器特刊社论
Editorial for the Special Issue on Micromachined Acoustic Transducers for Audio-Frequency Range.
作者信息
Rufer Libor, Shubham Shubham, Wang Haoran, Miller Tom, Honzík Petr, Ferrari Vittorio
机构信息
Advanced Design & Technology for MEMS, 38140 Rives, France.
Syntiant Corporation, Itasca, IL 60143, USA.
出版信息
Micromachines (Basel). 2025 Jan 8;16(1):67. doi: 10.3390/mi16010067.
Abstract
Microelectromechanical systems (MEMS) refer to miniaturized mechanical and electro-mechanical elements that are fabricated through microelectronic processes [...].
摘要
微机电系统（MEMS）是指通过微电子工艺制造的小型化机械和机电元件[……]。
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