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陶瓷激光微加工与印刷技术相结合作为快速制造半导体气体传感器的一种方法。

Combination of Ceramic Laser Micromachining and Printed Technology as a Way for Rapid Prototyping Semiconductor Gas Sensors.

作者信息

Samotaev Nikolay, Oblov Konstantin, Dzhumaev Pavel, Fritsch Marco, Mosch Sindy, Vinnichenko Mykola, Trofimenko Nikolai, Baumgärtner Christoph, Fuchs Franz-Martin, Wissmeier Lena

机构信息

Micro and Nanoelectronics Department, MEPhI (Moscow Engineering Physics Institute), National Research Nuclear University, 115409 Moscow, Russia.

Fraunhofer IKTS Institute, 01277 Dresden, Germany.

出版信息

Micromachines (Basel). 2021 Nov 25;12(12):1440. doi: 10.3390/mi12121440.

DOI:10.3390/mi12121440
PMID:34945292
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8707025/
Abstract

The work describes a fast and flexible micro/nano fabrication and manufacturing method for ceramic Micro-electromechanical systems (MEMS)sensors. Rapid prototyping techniques are demonstrated for metal oxide sensor fabrication in the form of a complete MEMS device, which could be used as a compact miniaturized surface mount devices package. Ceramic MEMS were fabricated by the laser micromilling of already pre-sintered monolithic materials. It has been demonstrated that it is possible to deposit metallization and sensor films by thick-film and thin-film methods on the manufactured ceramic product. The results of functional tests of such manufactured sensors are presented, demonstrating their full suitability for gas sensing application and indicating that the obtained parameters are at a level comparable to those of industrial produced sensors. Results of design and optimization principles of applied methods for micro- and nanosystems are discussed with regard to future, wider application in semiconductor gas sensors prototyping.

摘要

这项工作描述了一种用于陶瓷微机电系统（MEMS）传感器的快速且灵活的微纳制造方法。以完整MEMS器件的形式展示了用于制造金属氧化物传感器的快速成型技术，该器件可用作紧凑型小型表面贴装器件封装。通过对已预烧结的整体材料进行激光微铣削来制造陶瓷MEMS。已经证明，可以通过厚膜和薄膜方法在制造的陶瓷产品上沉积金属化层和传感膜。展示了此类制造传感器的功能测试结果，证明它们完全适用于气体传感应用，并表明所获得的参数与工业生产传感器的参数处于相当水平。讨论了微纳系统应用方法的设计和优化原则的结果，以用于未来在半导体气体传感器原型制作中更广泛的应用。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/75da/8707025/88cdc0a7354a/micromachines-12-01440-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/75da/8707025/3442fe2bdc39/micromachines-12-01440-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/75da/8707025/490243f3d062/micromachines-12-01440-g002a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/75da/8707025/f985f803581b/micromachines-12-01440-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/75da/8707025/e2f70c525571/micromachines-12-01440-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/75da/8707025/1c0cf42f504e/micromachines-12-01440-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/75da/8707025/2fc44f179ae8/micromachines-12-01440-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/75da/8707025/f0cdba5c7e6e/micromachines-12-01440-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/75da/8707025/88cdc0a7354a/micromachines-12-01440-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/75da/8707025/3442fe2bdc39/micromachines-12-01440-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/75da/8707025/490243f3d062/micromachines-12-01440-g002a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/75da/8707025/f985f803581b/micromachines-12-01440-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/75da/8707025/e2f70c525571/micromachines-12-01440-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/75da/8707025/1c0cf42f504e/micromachines-12-01440-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/75da/8707025/2fc44f179ae8/micromachines-12-01440-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/75da/8707025/f0cdba5c7e6e/micromachines-12-01440-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/75da/8707025/88cdc0a7354a/micromachines-12-01440-g008.jpg

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